Defects induced by electron irradiation in n-GaAs have been studied using deep level transient spectroscopy (DLTS) and Laplace DLTS (L-DLTS). The E 0.83 (EL2) is the only defect observed prior to irradiation. Ru/n-GaAs Schottky diodes were irradiated with high energy electrons from a Sr-90 radionuclide up to a fluence of 2.45 Â 10 13 cm À2 . The prominent electron irradiation induced defects, E 0.04 , E 0.14 , E 0.38 , and E 0.63 , were observed together with the metastable E 0.17 . Using L-DLTS, we observed the fine structure of a broad base EL2-like defect peak. This was found to be made up of the E 0.75 , E 0.83 , and E 0.85 defects. Our study reveals that high energy electron irradiation increases the concentration of the E 0.83 defect and introduces a family of defects with electronic properties similar to those of the EL2. V C 2016 AIP Publishing LLC. [http://dx