The heat transfer process of the inclination round jet impingement is studied experimentally for improving the cooling capacity and uniformity of the ultrafast cooling used in Thermo-mechanical Control Process. The heat transfer characteristic is presented for jet inclination angle from 0 to 60 . The video images of heat transfer process and heat flux curves demonstrate that the wetted region extends asynchronously due to the uneven water flow distribution. In the forward flow direction, the larger parallel flow velocity results to the fast wetting front propagation speed, and this is because the higher shear force under inclined condition is helpful to speed up the detachment of the bubbles on the surface. But in lateral and reverse directions, the situation is the opposite. The degree of asymmetry of the wetted region becomes remarkable, and at the same jet impingement cooling time, the wetted area increases at first and then shrinks with the increasing inclination angle. The larger jet velocity increases the maximum heat flux, and accelerates the wetting front propagation, especially in the parallel flow region. Thus, inclination jet impingement with the reasonable angle and jet velocity improves the heat transfer capability and plate surface cooling uniformity within the measurement region.