This study examined the effects of three cumulative c-ray irradiation doses on AlGaN/GaN epilayer material and on high electron mobility transistor (HEMT) devices. After a cumulative c-ray dose of 16 kGy, the Hall mobility increased from 1800 cm 2 /V s to 2100 cm 2 /V s, as determined through Hall measurement. Atomic force microscopy indicated an improvement in surface roughness but no change in the surface potential ; s ð Þ. The HEMT device exhibited improvement in the drain current, with a subtle decreasing tendency in the leakage current. At high doses of c-ray irradiation, the trends in the material and device parameters saturated. Moreover, the metal-semiconductor interface degraded, as confirmed through scanning electron microscopy image analysis.