1993 IEEE MTT-S International Microwave Symposium Digest
DOI: 10.1109/mwsym.1993.277004
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Effects of ground equalization on the electrical performance of asymmetric CPW shunt stubs

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Cited by 5 publications
(4 citation statements)
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“…A low-resistivity silicon wafer with bulk resistivity of [10][11][12][13][14][15][16][17][18][19][20] cm is coated with a 5-m-thick thermal silicon dioxide. The bottom metal layer (Metal 1) is a 3.5-m-thick aluminum layer formed by evaporation and lift-off processes.…”
Section: A Vertical Interconnects and Transitionsmentioning
confidence: 99%
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“…A low-resistivity silicon wafer with bulk resistivity of [10][11][12][13][14][15][16][17][18][19][20] cm is coated with a 5-m-thick thermal silicon dioxide. The bottom metal layer (Metal 1) is a 3.5-m-thick aluminum layer formed by evaporation and lift-off processes.…”
Section: A Vertical Interconnects and Transitionsmentioning
confidence: 99%
“…The imbalance causes degradation of insertion loss and return loss due to distortion in the phase of the wavefront. In order to minimize this imbalance and the radiating slot mode caused by different path length traversed by the magnetic current wave, traditionally bond-wires [19], dielectric slabs [see [22], or continuous top and bottom shielding [23] are used to achieve ground equalization. These techniques add to the local parasitic capacitance, inductance, and resistances, which should be included to obtain an accurate design model.…”
Section: A Designmentioning
confidence: 99%
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“…Although several methods have been introduced to effectively reduce stub lengths (e.g. bent lines [7], meander structures [8] and capacitive-loading [9]) it can be difficult to control performance over a broad frequency band, or in more than one narrow band of interest.In this paper we consider compact, coplanar waveguide (CPW) shunt stub filters on high resistivity silicon that are designed to [7,8,10,11]. The filters studied here used ϳ1 m-thick Cr-Ag-Cr-Au layers for the MIM and CPW metal, and a 0.58 m-thick SiO layer ( r ϭ 6) for the capacitor dielectric [12].…”
mentioning
confidence: 99%