The humidity effects on the benzene decomposition process were investigated by the dielectric barrier discharge (DBD) plasma reactor. The results showed that the water vapor played an important role in the benzene oxidation process. It was found that there was an optimum humidity value for the benzene removal efficiency, and at around 60% relative humidity (RH), the optimum benzene removal efficiency was achieved. At a SIE of 378 J/L, the removal efficiency was 66% at 0% RH, while the removal efficiency reached 75.3% at 60% RH and dropped to 69% at 80% RH. Furthermore, the addition of water inhibited the formation of ozone and NO2 remarkably. Both of the concentrations of ozone and NO2 decreased with increasing of the RH at the same specific input energy. At a SIE of 256 J/L, the concentrations of ozone and NO2 were 5.4 mg/L and 1791 ppm under dry conditions, whereas they were only 3.4 mg/L and 1119 ppm at 63.5% RH, respectively. Finally, the outlet gas after benzene degradation was qualitatively analyzed by FT-IR and GC-MS to determine possible intermediate byproducts. The results suggested that the byproducts in decomposition of benzene primarily consisted of phenol and substitutions of phenol. Based on these byproducts a benzene degradation mechanism was proposed.