2019
DOI: 10.1016/j.nimb.2019.03.009
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Effects of ion irradiation on chemical and mechanical properties of magnetron sputtered amorphous SiOC

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Cited by 7 publications
(10 citation statements)
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“…The G band is comparably broadened and less pronounced, see Figure 6d−f. As reported in the literature, 21,26,42 such broadbands are characteristics of the disorder and poor crystallinity. The second-order vibrational modes of the 2D and 2G bands nearly disappear, as well as the combination bands of D + G and T + D, indicating the loss of long-range order.…”
Section: Methodsmentioning
confidence: 68%
See 1 more Smart Citation
“…The G band is comparably broadened and less pronounced, see Figure 6d−f. As reported in the literature, 21,26,42 such broadbands are characteristics of the disorder and poor crystallinity. The second-order vibrational modes of the 2D and 2G bands nearly disappear, as well as the combination bands of D + G and T + D, indicating the loss of long-range order.…”
Section: Methodsmentioning
confidence: 68%
“…Recently, an amorphous SiOC ceramic composed of aperiodic arranged mixed-bonded Si–O–C tetrahedra units has been reported to be of superior radiation tolerance. A wide range of irradiation conditions can result in atomic displacement and connectivity topology changes, but there is no sign of crystallization, void formation, or phase segregation. , Through a combination of experiments and modeling, amorphous SiOC ceramic is demonstrated to be “immune” to He-induced damage . However, an amorphous structure usually possesses higher free energy than its crystalline counterpart, which is in a metastable state.…”
Section: Introductionmentioning
confidence: 99%
“…In our preliminary study, we found that pure MoS 2 film has great limitations in its application, and its irradiation resistance is poor, meaning it was necessary to design its anti-irradiation structure [ 8 , 9 ]. Some studies have shown that amorphous structures lack long-range order and do not contain conventional lattice defects, thus offering the possibility of eliminating irradiation damage in polycrystalline solids [ 10 , 11 , 12 , 13 , 14 , 15 ]. For example, amorphous SiOC films deposited by magnetron sputtering showed no signs of crystallization, void formation or segregation in all irradiated samples [ 10 ].…”
Section: Introductionmentioning
confidence: 99%
“…Silicon oxycarbide materials have been received over the decades by numerous methods: Chemical vapor deposition (CVD) and its modifications [ 35 , 36 ], magnetron sputtering [ 37 ], spark plasma sintering (SPS) [ 38 ], and the others [ 13 ]. These methods are quite complicated and also require expensive laboratory equipment.…”
Section: Introductionmentioning
confidence: 99%