Effects of Ion Irradiation on Ferromagnetic Thin Films

Baglin, J. E. E.; Tabacniks, M.H.; Fontana, R.E.; Kellock, A. J.; Bardin, Thomas

doi:10.4028/www.scientific.net/msf.248-249.87

Cited by 11 publications

(4 citation statements)

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“…2c). This data are similar to previously reported observations on permalloy thin films where an increase in coercivity was attributed to the introduction of extended defects [10]. In the present study such extended effects are represented by Ga rich grain boundaries.…”

supporting

confidence: 93%

Ion implantation of magnetic thin films and nanostructures

Litvinov

Wolfe

Svedberg

et al. 2004

Journal of Magnetism and Magnetic Materials

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supporting

confidence: 93%

Ion implantation of magnetic thin films and nanostructures

Litvinov

Wolfe

Svedberg

et al. 2004

Journal of Magnetism and Magnetic Materials

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“…͑Previ-ous research on the ion irradiation of Ni 80 Fe 20 has used films that were an order of magnitude thicker than those used here and thus found comparatively more minor irradiation effects. 11 ͒…”

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confidence: 99%

Patterning ferromagnetism in Ni80Fe20 films via Ga+ ion irradiation

Kaminsky

Jones

Patel

et al. 2001

Applied Physics Letters

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We demonstrate that focused Ga+ ion irradiation can comprehensively modify the ferromagnetic properties of Ni80Fe20 thin films. Magneto-optic Kerr effect measurements at room temperature and magnetoresistance measurements at temperatures between 1.5 and 270 K characterized the irradiation effects. Irradiation steadily reduced the films’ room temperature coercivity, and a dose of 1.0×1016 ions/cm2 at 30 keV was found sufficient to cause a loss of ferromagnetism at room temperature in films of thickness up to 15.5 nm. In situ end-point detection and postirradiation atomic force microscopy confirmed that the sputtering which accompanied doses up to 1.0×1016 ions/cm2 did not compromise the protective caps on these Ni80Fe20 films. We therefore conclude that the modification of ferromagnetic properties occurred primarily because of direct Ga+ ion implantation. From these results, we speculate that focused Ga+ ion irradiation could be a convenient tool for the nanoscale patterning of magnetic properties in 3d transition metal thin films.

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“…In this way, collision cascades are absent and the structural modifications are confined to the vicinity of the ion path in a metal. Furthermore, the effect of irradiation on the magneto-elastic properties of single Permalloy films and a direct comparison between field free ion irradiation and annealing has not yet been reported 30 .…”

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confidence: 99%

Optimization of Permalloy properties for magnetic field sensors using He$^+$ irradiation

Masciocchi¹,

Jagt²,

Syskaki³

et al. 2023

Preprint

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Permalloy, despite being a widely utilized soft magnetic material, still calls for optimization in terms of magnetic softness and magnetostriction for its use in magnetoresistive sensor applications. Conventional annealing methods are often insufficient to locally achieve the desired properties for a narrow parameter range. In this study, we report a significant improvement of the magnetic softness and magnetostriction in a 30 nm Permalloy film after He + irradiation. Compared to the as-deposited state, the irradiation treatment reduces the induced anisotropy by a factor ten and the hard axis coercivity by a factor five. In addition, the effective magnetostriction of the film is significantly reduced by a factor ten -below 1 × 10 −7 -after irradiation. All the above mentioned effects can be attributed to the isotropic crystallite growth of the Ni-Fe alloy and to the intermixing at the magnetic layer interfaces under light ion irradiation. We support our findings with X-ray diffraction analysis of the textured Ni 81 Fe 19 alloy. Importantly, the sizable magnetoresistance is preserved after the irradiation. Our results show that compared to traditional annealing methods, the use of He + irradiation leads to significant improvements in the magnetic softness and reduces strain cross sensitivity in Permalloy films required for 3D positioning and compass applications. These improvements, in combination with the local nature of the irradiation process make our finding valuable for the optimization of monolithic integrated sensors, where classic annealing methods cannot be applied due to complex interplay within the components in the device.

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Effects of Ion Irradiation on Ferromagnetic Thin Films

Cited by 11 publications

References 0 publications

Ion implantation of magnetic thin films and nanostructures

Ion implantation of magnetic thin films and nanostructures

Patterning ferromagnetism in Ni80Fe20 films via Ga+ ion irradiation

Optimization of Permalloy properties for magnetic field sensors using He$^+$ irradiation

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