2019
DOI: 10.1007/s10854-019-01646-w
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Effects of laser pulse energy on the structural, optical and electrical properties of pulsed laser deposited Ga-doped ZnO thin films

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Cited by 11 publications
(3 citation statements)
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“…The formation of In droplets is a common problem in InGaN growth, and here it is mainly correlated with the adsorption and diffusion behaviors of incident particles on the substrate. Ablation of pulsed laser on the target can produce high energy incident particles, which provide necessary energy for atoms to adsorb and diffuse [19]. InGaN film deposited at relatively low laser energy (125 mJ/pulse) has insufficient energy to diffuse on the substrate surface.…”
Section: Resultsmentioning
confidence: 99%
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“…The formation of In droplets is a common problem in InGaN growth, and here it is mainly correlated with the adsorption and diffusion behaviors of incident particles on the substrate. Ablation of pulsed laser on the target can produce high energy incident particles, which provide necessary energy for atoms to adsorb and diffuse [19]. InGaN film deposited at relatively low laser energy (125 mJ/pulse) has insufficient energy to diffuse on the substrate surface.…”
Section: Resultsmentioning
confidence: 99%
“…The carrier concentration and Hall mobility increase rapidly with the increasing of laser energy, and reach the maximum of 5.66 × 10 18 cm −3 and 20.30 cm 2 /Vs at 175 mJ/pulse due to the increase of In content. According to the equation [19]: the resistivity (ρ) is in inverse proportion to Hall mobility (μ) and carrier concentration (N). In this experiment, the resistivity of InGaN films is decreased in two orders of magnitude from 11.29 to 0.05 Ω•cm as the laser energy increases from 125 to 175 mJ/pulse.…”
Section: Resultsmentioning
confidence: 99%
“…34 Estimation of WF from a MOSFET device is a comparatively cheaper alternative and is a simple process. GZO thin films are synthesized by a variety of deposition techniques such as spray pyrolysis, 35 magnetron sputtering, 36 sol-gel deposition, 37 pulsed laser deposition, [38][39][40] ion plating, 41 metal-organic chemical vapor deposition 42,43 and atomic layer deposition. 44,45 In this report, we demonstrate a unique method of estimating the WF of RF sputtered GZO thin film from a MOSFET device.…”
mentioning
confidence: 99%