One of the biggest challenges for future high-performance three dimensional (3D) integrated devices is heat removal from the stacked dies. In this study, thermally enhanced preapplied type underfills were studied. These materials were formulated considering fillet cracks and delaminations that appeared in thermal cycling tests on 2D organic package. Finally, the applicability for 3D integration processing with the new material was evaluated on a 3D test vehicle assembly.
IntroductionThree-dimensional (3D) chip integration with throughsilicon-vias (TSVs) supports higher performance, lower power, and smaller footprints. Highly integrated 3D devices create higher heat densities due to their small sizes. One of the biggest challenges for future 3D devices is to accelerate the heat transfer within chip stacks. To cool the stack, improving the thermal conductivity of the underfills between the dies is one of the more promising approaches. However, since standard silica-filler-base capillary type underfills do not have good thermal properties due to the low thermal conductivity of the silica filler, some other highly thermally conductive filler must to be selected for these thermally enhanced underfills. Such high-filler-loaded underfills with high thermal conductivity have high viscosities. Therefore, the industry-standard capillary method to add underfills after the chip-join step will not work well for proposed 3D devices with narrow gaps, large dies, or multi-stacked dies. In this study, pre-applied type thermal conductive underfills were studied. The materials with flux chemicals can be applied to wafer, die, or substrate, and then bond the chips and substrates with solder joints. With this type of underfill, not only the reliability but also the processing windows for good solderjoint yield and process capability strongly depend on the material properties. Therefore, some trial and error is necessary in the development. Thermal modeling is used to understand the heat flows and the efficacy of various thermal underfill materials for the 3D stacks [1]. As shown in Fig. 1, a joint layer consisting of solder bumps and a standard underfill (0.4 W/mK) will increase the thermal resistance within a package structure. In this model, if a thermally conductive underfill (2.0 W/mK) is used, then the thermal resistance will be dramatically reduced. At the same time, such thermally enhanced underfills must contain highly thermally conductive fillers. However, since the material properties of such fillers differ from those of standard silica fillers, the formulation of the thermal underfill must be carefully optimized by considering all of the material properties of the compound. It is a major challenge to discover the optimal properties of a