Effects of polarization on laser holography for microstructure fabrication

Abstract

We perform a kind of computer stimulation on the multi-laser-beam interference. Using this method, we picture the interference patterns and describe the influence of the polarization of lights upon the clarity of the pattern. We find out the relations between the polarization states of the lights for the case of the best pattern and provide an optimal solution of the polarization on holographic lithography technology, and experiential formulas. This kind of analysis will improve the fabrication of submicrometer periodic structure efficiently.

Fabricating three‐dimensional polymeric photonic structures by multi‐beam interference lithography

“…The combination of these parameters determines the overall symmetry and contrast of the resulting lattice. 32,34,44,45 Multi-beam interference previously has been used to write hologram gratings, to create optical traps for laser-cooled atoms 46 , and to pattern optical tweezer arrays. [47][48][49] Recently, it has been integrated with lithography to produce periodic structures with sub-micron resolution in photoresists.…”

Photonic crystals and microlasers fabricated with low refractive index material

“…Therefore, how to select the angle between the polarization direction of the incident light and the grating vector and how to adjust the diffraction efficiency of the grating [62] to compensate the change of lattice structures and the reduction in contrast caused by changes of the polarization state are interesting issues worthy of further in-depth exploration. Cai et al [63,64] and Wang et al [65] explored issues about adjusting independently the beam intensity, phase, and polarization more in-depth and proved that all 14 Bravais lattices can be formed by four-beam interference. Relevant theoretical simulation and exploration of holographic interference experiment have been under way [66][67][68][69][70].…”

Fabrication of Complex Micro/Nanopatterns on Semiconductors by the Multi-beam Interference of Femtosecond Laser

“…The number and spatial arrangement of interfering beams determine mainly intensity patterns. Laser polarization and phase also play important roles in interference patterns and are usually manipulated to improve the aspect ratio of periodic structures [3][4][5][6]. By adjusting the polarization and phase of laser beams, different microstructures, such as compound photonic crystals, magnetic metamaterials and plasmonic nanogap array, have been fabricated.…”