Two ty(w.s of s,eels, SKDI 1 and NAK55. with and without chromiunl were implanted with 30 keV nitrogen ions to a dose 2 • Ill ~" cm " using the new deep implantation process after the preliminary surface treatmeu! by a quasi-neutral intense nitrogen ion flux with the energy 300 eV up to the Ill:" cm ". The thickne.~s of the hardened layer significantly increased up to 9 2(t lain by 5 minutes irradiation with 30t) eV nitroger: ions at temperatures between 251) and 300"C The ~,~..car resistance of marlcnsitic steel SKDll was drastically improved by a factor of 20 after pre-plasma irradiation Deep implantation al.~ reduces the wear of NAKS5 by an order of magnitude, associated with an increase in hardness by a factor of 2.4 at a:t applied load ot 51) gf due to the fl~rmalion of Fe: ~N and CrN.