Effects of reflecting layers on resonance characteristics of a solidly mounted resonator with ¼ λ mode configuration

Effects of Thermal Annealing on the Characteristics of High Frequency FBAR Devices

“…Some novel materials can be used in acoustic wave devices, such as, GaN, AlGaN, ScGaN and ScAlN [8][9][10]. In general, zinc oxide (ZnO) and aluminum nitride (AlN) thin films are commonly used in acoustic wave devices [11][12][13][14][15][16][17][18][19][20]. The lead zirconate titanate (PZT) thin films are not adopted due to their impacts on the environment.…”

The deposition and wet etching of Mg-doped ZnO films and their applications for solidly mounted resonators

“…[5][6][7][8] As a kind of FBAR, solidly mounted resonators (SMRs) are composed of a piezoelectric layer sandwiched between electrodes and Bragg reector consisting of alternating high and low acoustic impedance quarter-wavelength thick dielectric or metallic layers. 9,10 The SMR, with good mechanical strength and excellent acoustic properties, and being closer to CMOS integration, was therefore chosen in this work. 11,12 In recent decades, owing to excellent piezoelectric property, better quality factor, and high electromechanical coupling coefficient, ZnO is becoming a very promising candidate for FBAR devices as a piezoelectric material.…”

Solidly mounted resonator sensor for biomolecule detections

“…[22][23][24] There are two types of FBARs, one with a freestanding membrane and the other solidly mounted resonator (SMR) composed of a piezoelectric thin lm sandwiched between electrodes and Bragg reector consisting of alternating high and low acoustic impedance quarter-wavelength thick dielectric or metallic layers. 25,26 By comparing and studying, the SMR with the simple fabrication, good mechanical strength, excellent acoustic properties and closer to CMOS integration was fabricated as a promising candidate for biomolecule detections. 27,28 In this paper, we explored the possibility of AlN lm SMR as a sensor for biomolecule detections.…”