“…Recently, self-assembled nanofilms (SANFs), including self-assembled monolayers (SAMs), self-assembled multilayer films (SAMFs), self-assembled inorganic films (SAIFs) and selfassembled organic-inorganic composite films (SAO-ICFs), have generated substantial interest not only for its simple preparation procedure but also for its wide potential applications in many fields, such as surface modification, boundary lubricant coatings, sensors, photoelectronics, and functional bio-membrane modeling, etc (Foisner et al, 2004;Gulino et al, 2004;Hsu, 2004;Love et al, 2005;Ostuni et al, 1999;Ulman, 1996;. As a potential lubricant film for controlling stiction and friction in micro-/nano-electromechanical systems (MEMS/NEMS), SANFs offers distinct advantages over other strategies for lubrication of MEMS/NEMS devices.…”