2014
DOI: 10.1007/s11771-014-2078-1
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Effects of thermal transport properties on temperature distribution within silicon wafer

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Cited by 2 publications
(2 citation statements)
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“…The temperatures of the substrate and of the quartz window depend on the absorptivity and on the emissivity of the substrate. The more they are important, the higher the temperatures get [17]. Thus, the quartz window is heated by the radiations emitted by the substrate.…”
Section: Discussionmentioning
confidence: 99%
See 1 more Smart Citation
“…The temperatures of the substrate and of the quartz window depend on the absorptivity and on the emissivity of the substrate. The more they are important, the higher the temperatures get [17]. Thus, the quartz window is heated by the radiations emitted by the substrate.…”
Section: Discussionmentioning
confidence: 99%
“…Uniform temperature at the wafer surface is hard to obtain due to harsh power tuning of halogen infrared lamps, to the presence of edge effects for the wafer and to thermal gradients generated by the cold reactor wall [16,17]. Other effects are the convection in the reactor and not sufficiently high reflectivity of the reactor wall.…”
Section: Introductionmentioning
confidence: 99%