“…Titanium nitride (TiN) thin films have attracted much attention for various applications such as solar control windows, 1,2) hard coatings, 3,4) and microelectronics. [5][6][7][8][9] The TiN thin films were usually deposited by sputtering, 1,2,[5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] ion plating, 3,20,21) and chemical vapor deposition 5,22,23) for each application. In the glass window industry, magnetron sputtering should have a great advantage in forming uniform films in a large area of more than 1 m 2 .…”