Efficient design of micromechanical gyroscopes

Abstract

We consider a general approach to the analysis of the dynamics and errors of different types of micromechanical vibratory gyroscopes, as well as calculation of their performances for application in the design of such gyroscopes. Specifically, we investigate and analyse the dynamics and errors of single-mass gyroscopes, for both translational and rotational movement of the sensitive element. Based on the generalized motion equations, we derive and analyse analytical dependences for basic errors, such as scale factor nonlinearity, bias from misalignment between elastic and measurement axes, and bias from vibrations and dynamic error caused by harmonic angular rate. As a result of dynamics and errors analysis, formulae for the calculation of the main performances are derived, as well as optimal sensitive element design methodologies.

Bio-inspired hair-based inertial sensors

“…As a consequence, a trade-off exists between the sensitivity parameter R and the response time t 95 (see also Apostolyuk et al, 2002). Namely, to have a good sensitivity R, a large k-value is required, but to obtain a fast responding system, k should be small.…”

Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology

“…As a consequence, a trade-off exists between the sensitivity parameter R and the response time t 95 and bandwidth Dv (see also [38]). Namely to have a good sensitivity R, a large k-value is required, but to obtain a fast and wide-band responding system, k should be small.…”

Application of an optimization methodology for multidisciplinary system design of microgyroscopes

“…1. This equation was then modified by further considering the correlations of its resolution, bias, sensitivity, linearity and bandwidth, following the approach proposed by Apostolyuk et al (2002). For this context, the sensitivity of the microgyroscope was taken as an objective function in the whole process of optimization.…”