Application of an optimization methodology for multidisciplinary system design of microgyroscopes

Yuan, Weizheng; Chang, Honglong; Li, Weijian; Ma, Binghe

doi:10.1007/s00542-005-0054-2

Cited by 14 publications

(8 citation statements)

References 13 publications

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“…However, the bandwidth would be hence narrowed down. In order to enhance the detection capability of the micro-gyroscope, numerous optimization design criteria have been proposed (Ongkodjojo and Tay 2002;Yuan et al 2006). In this paper, a convenient approach, based on pole/zero mapping, is proposed to meet the required performance specifications.…”

Section: Design Via Pole/zero Mapping To Meet Performance Specificationmentioning

confidence: 99%

Performance characterization of a decoupled tri-axis micro angular rate sensor

2008

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A novel tri-axis micro-gyroscope is proposed in this paper. Three orthogonal axis angular rates, pitch, yaw, and row, can be detected simultaneously by the designed micro-gyroscope. The coupling effect of the tri-axis angular rates due to Coriolis response and nonlinearity of the high frequency modes can be efficiently reduced by the decoupled mechanical structure design. Firstly, an 8 9 8 linearized state-space representation with a holonomic constraint is established and the relative stability is investigated. Secondly, the mathematical description and discussion upon performance indices for micro-gyroscope such as sensitivity, nonlinearity, and resolution are addressed. In addition, the quality factor is verified to be a significant design parameter for the micro-gyroscope. The performance and stability of the gyroscope could be degraded by choosing inappropriate quality factors. Moreover, the trade-off among performance indices for the gyroscope is theoretically evaluated and discussed. Finally, in order to meet most performance specifications, a pole/ zero mapping design method is proposed to satisfy either large bandwidth or high resolution requirements.

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Section: Design Via Pole/zero Mapping To Meet Performance Specificationmentioning

confidence: 99%

Performance characterization of a decoupled tri-axis micro angular rate sensor

2008

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“…There are also many typical topologies for gyroscopes [ 31 – 36 ] that are compatible with the above-mentioned process flow. In the current version, there are many essential improvements on gyroscopes to increase the yield rate of the MIMU.…”

Section: Topologies Selection For the Inertial Sensors Based On A Twomentioning

confidence: 99%

Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

Chang

Shen

Zhou

et al. 2010

Sensors

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A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a global area optimization method based on the relationship between the sensitivity and layout area was proposed to determine the layout configuration of the six sensors. The scale factors of the X/Y-axis accelerometer and Z-axis accelerometer are about 213.3 mV/g and 226.9 mV/g, respectively. The scale factors of the X/Y-axis gyroscope and Z-axis gyroscope are about 2.2 mV/°/s and 10.8 mV/°/s, respectively. The bias stability of the X/Y-axis gyroscope and the Z-axis gyroscope are about 2135 deg/h and 80 deg/h, respectively. Finally, the resolutions of X/Y-axis accelerometers, Z-axis accelerometers, X/Y-axis gyroscopes, and Z-axis gyroscopes are 0.0012 g/Hz, 0.0011 g/Hz, 0.314 ° /normals/Hz, and 0.008 ° /normals/Hz, respectively.

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“…Furthermore, the efficiencies of engine, torque transfer system, and brake system can be evaluated via accelerometer. Accelerometers can be employed to measure the vibrations of automobiles, machines, buildings, control systems process, and device installation safety (Yuan et al 2006;Marek et al 2005).…”

Section: Introductionmentioning

confidence: 99%

A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

2020

Informacije MIDEM

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In this paper a three-axis capacitor accelerometer has been designed, analyzed and optimized using microelectromechanical systems technology. The accelerometers are generally divided into three categories of single axis, two axes, and three axes in terms of their ability to measure acceleration. In the suggested structure, acceleration measurements are carried out on all three axes simultaneously using a mass and spring system, which makes it possible to achieve a high sensitivity at a low occupancy level without losing other accelerator factors. By taking difference in this structure, it is shown that each axis acceleration has a very low impact on the measured acceleration of the other two axes. If any external factor changes the value of a single capacitor, the original output of the capacitor does not change for detecting acceleration. In other words, the acceleration of any of these three axes, due to its designing features, does not influence the other two axes and the system performance cannot be disrupted by external factors. The other important characteristics of the accelerometers are dynamic range, operating frequency and sensitivity. This study covers a dynamic range up to 1000g and an operating frequency up to 20 kHz. The accelerometer sensitivity is 4 fF/g in the z axis direction while it is 9 fF/g in the x and y axes directions. In this paper, the simulation of the structure is performed using Intellisuite software. Moreover, a multi-objective genetic optimization algorithm has been used to determine the dimensions of the constituents of the spring and the weight.

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Application of an optimization methodology for multidisciplinary system design of microgyroscopes

Cited by 14 publications

References 13 publications

Performance characterization of a decoupled tri-axis micro angular rate sensor

Performance characterization of a decoupled tri-axis micro angular rate sensor

Design, Fabrication, and Testing of a Bulk Micromachined Inertial Measurement Unit

A Design and Optimization of a New, Three-Axis MEMS Capacitive Accelerometer with High Dynamic Range and Sensitivity

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