Performance characterization of a decoupled tri-axis micro angular rate sensor

Abstract

A novel tri-axis micro-gyroscope is proposed in this paper. Three orthogonal axis angular rates, pitch, yaw, and row, can be detected simultaneously by the designed micro-gyroscope. The coupling effect of the tri-axis angular rates due to Coriolis response and nonlinearity of the high frequency modes can be efficiently reduced by the decoupled mechanical structure design. Firstly, an 8 9 8 linearized state-space representation with a holonomic constraint is established and the relative stability is investigated. Secondly, the mathematical description and discussion upon performance indices for micro-gyroscope such as sensitivity, nonlinearity, and resolution are addressed. In addition, the quality factor is verified to be a significant design parameter for the micro-gyroscope. The performance and stability of the gyroscope could be degraded by choosing inappropriate quality factors. Moreover, the trade-off among performance indices for the gyroscope is theoretically evaluated and discussed. Finally, in order to meet most performance specifications, a pole/ zero mapping design method is proposed to satisfy either large bandwidth or high resolution requirements.

A novel active vibration isolator applied for micro-gyro by array of deposited electrodes

“…Micro-machined gyroscopes are generally driven into resonance at specific frequencies, and therefore especially susceptible to the environmental vibrations near the resonant frequencies. The undesired transmitted resonance can potentially result in irreversible device function failure (Tsai et al 2009). In order to retain expected angular rate detection capability and sufficient signal to noise (S/N) ratio of the micro-gyroscopes, how to minimize the vibration disturbance transmitted from the shocked base becomes one of most significant challenges in practice (Braman and Grossman 2006).…”