Study on a vibratory tri-axis MEMS gyroscope with single drive and multiple axes angular rate sense

Tingkai, Zhang; Xing, Chaoyang; Zhang, Ling; Wang, Wei

doi:10.1007/s00542-014-2313-6

Cited by 7 publications

(2 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…The global market survey shows a growing demand for inertial sensors due to their improved performance, replacing their macro counterparts in many promising applications such as consumer electronics, robotics, avionics, electronic stability control (ESC), global navigation satellite system (GNSS), and image stabilization [ 1 , 2 , 3 , 4 , 5 , 6 , 7 ]. Specifically, MEMS gyroscopes have been progressively famous for their ultra-high measurement sensitivity, high reliability, low power consumption, and low cost [ 2 , 8 , 9 , 10 ].…”

Section: Introductionmentioning

confidence: 99%

Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

Din

Iqbal

Park

et al. 2022

Sensors

View full text Add to dashboard Cite

The performance of microelectromechanical system (MEMS) inertial measurement units (IMUs) is susceptible to many environmental factors. Among different factors, temperature is one of the most challenging issues. This report reveals the bias stability analysis of an ovenized MEMS gyroscope. A micro-heater and a control system exploiting PID/PWM were used to compensate for the bias stability variations of a commercial MEMS IMU from BOSCH “BMI 088”. A micro-heater made of gold (Au) thin film is integrated with the commercial MEMS IMU chip. A custom-designed micro-machined glass platform thermally isolates the MEMS IMU from the ambient environment and is vacuum sealed in the leadless chip carrier (LCC) package. The BMI 088 built-in temperature sensor is used for temperature sensing of the device and the locally integrated heater. The experimental results reveal that the bias repeatability of the devices has been improved significantly to achieve the target specifications, making the commercial devices suitable for navigation. Furthermore, the effect of vacuum-packaged and non-vacuum-packaged devices was compared. It was found that the bias repeatability of vacuum-packaged devices was improved by more than 60%.

show abstract

Section: Introductionmentioning

confidence: 99%

Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

Din

Iqbal

Park

et al. 2022

Sensors

View full text Add to dashboard Cite

show abstract

“…Compared with single-axis gyroscopes, mechanically designing multi-axis gyroscopes are quite complicated and challenging, as it requires both in-plane and out-of-plane motions. Different design approaches have been used in the literature to improve the performance of multi-axis gyroscopes [11,12,13,14]. An ultra-compact multi-axis gyroscope was reported utilizing the torsional drive mode [11].…”

Section: Introductionmentioning

confidence: 99%

Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth

2019

View full text Add to dashboard Cite

This paper presents the design, fabrication, and characterization of a highly sensitive, single drive multi-axis gyroscope. The multi-axis gyroscope allows for a wide bandwidth in all three axes (X, Y, Z) and exhibits high linearity. The fabricated multi-axis gyroscope was fabricated with a structural thickness of 30 µm and packaged at 100 mtorr using wafer level packaging. The fabricated multi-axis gyroscope has a small footprint of 1426 × 1426 µm2, making it one of the smallest multi-axis gyroscopes. A custom printed circuit board (PCB) was designed for the evaluation of the multi-axis gyroscope. The experimental results demonstrate that the gyroscope has a high sensitivity of 12.56 μ V / dps , 17.13 μ V / dps and 25.79 μ V / dps in the roll (X-sense), pitch (Y-sense) and yaw (Z-sense) modes respectively. The scale-factor non-linearity of the gyroscope is less than 0.2 % for roll and pitch mode and 0.001 % for the yaw mode, in the full-scale range of ± 1500 deg / s . The multi-axis gyroscope demonstrates an angle random walk of 2.79 dps / Hz , 2.14 dps / Hz , and 1.42 dps / Hz , for the roll, pitch and yaw rate with the in-run bias stability 1.62 deg / s , 1.14 deg / s and 0.84 deg / s respectively.

show abstract

Design and Analysis of Single Drive Tri-Axis MEMS Gyroscope

Chabbi

Khedkar²,

Rao³

2022

Mechanisms and Machine Science

View full text Add to dashboard Cite

Study on a vibratory tri-axis MEMS gyroscope with single drive and multiple axes angular rate sense

Cited by 7 publications

References 9 publications

Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

Bias-Repeatability Analysis of Vacuum-Packaged 3-Axis MEMS Gyroscope Using Oven-Controlled System

Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth

Design and Analysis of Single Drive Tri-Axis MEMS Gyroscope

Contact Info

Product

Resources

About