13 µm and 0.1 µm CMOS technology. 4.12 I-V characteristics of two NMOS transistors with the same L drawn but different L eff measured by our modified shift-and-ratio method with a Vgs range from 0.2 to 0.5 V , showing that a higher off current and a higher on current correspond to a smaller L eff measured. 4.13 L eff extracted for different Vgs range for 0.13 µm CMOS technology NMOS transistors. V ds was biased at 0.05 V. 4.14 ∆L extracted for different Vgs range for 0.13 µm CMOS technology PMOS transistors. V ds was biased at 0.05 V. 4.15 (a) Variation of L eff in I on-log I off relationship (b) Variation of DIBL in I on-log I off relationship. 4.16 I on versus DIBL for both NMOS and PMOS transistors 4.17 Logarithm of I off versus DIBL for both NMOS and PMOS transistors 4.18 Plot of L eff vs. I off for NMOS transistors fabricated by 0.11 µm CMOS technology. L eff was extracted by MS&R method (0.1-0.5 V V gs range) and also the capacitance method. (Note: CC is correlation coefficient.) 4.19 Plot of L eff vs. I off for NMOS transistors fabricated by 0.11 µm CMOS technology. L eff was extracted by MS&R method at 3 different V gs ranges and also by the S&R method for one V gs range. (Note: CC is correlation coefficient.) 4.20 Plot of L eff vs. I off for PMOS transistors fabricated by 0.11 µm CMOS technology. L eff was extracted by MS&R method (0.1-0.5 V V gs range) and the capacitance method. (Note: CC is correlation coefficient.) 4.21 Plot of L eff vs. I off for PMOS transistors fabricated by 0.11 µm CMOS technology. L eff was extracted by MS&R method for 3 different V gs ranges and also by the S&R method for one V gs range. (Note: CC is correlation coefficient.) 4.22 Plot of I off vs. L eff for NMOS and PMOS transistors fabricated by 90 nm CMOS technology with L gate of 60nm. L eff was extracted by MS&R method (0.1-0.3 V V gs range), (Note: CC is correlation coefficient.) 4.23 Box plot of the measured FICD against various percentages of BARC over-etch trimming.