Efficient Implementation of Rigorous Coupled-Wave Analysis for Analyzing Binary Gratings

Li, Jie; Shi, Lihua; Ma, Yao; Sun, Zheng; Zhang, Qi; Fu, Shangchen; Liu, Yicheng; Ran, Yuzhou; Wang, Jianbao

doi:10.1109/lawp.2020.3024640

Cited by 9 publications

(5 citation statements)

References 21 publications

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“…Accuracy of eigenmode restoration and new mode matching procedures are validated using benchmark cases with both perfect electric conductor (PEC) boundary condition and PBC. The High-Frequency Structural Simulator (HFSS) [21], [22] software and RCWA (Rigorous Coupled Wave Analysis) method [23]- [26] are adopted to verify the proposed method. Relevance between Lanczos iteration steps and structure complexity are explored by specific simulation cases.…”

Section: Introductionmentioning

confidence: 99%

A Hybrid Eigenmode Restoration Algorithm for Computational Lithography Problems Based on Mode Matching Principle

Liu

et al. 2022

IEEE Access

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The mode matching method is an efficient solution to conventional microwave waveguide problems for its dimensionality advantages. It is theoretically extendable to computational lithography problems in nano scales with periodic boundary condition. The high computational complexity of conventional mode matching limits its application significance in highly complicated nano scale problems. This paper introduces an optimized efficient mode matching method for computational lithography problems whose complexity is O(N 1.5 ). This bottleneck is breached by transforming governing equations with Lanczos algorithm. A novel hybrid eigenmode restoration algorithm is proposed to solve the eigenmode accuracy loss by involving the Arnoldi method. Benchmark cases verify the accuracy of the restored eigenmode and mode matching method with from microwave to nano scale problems. The efficiency is further optimized by exploring the relevance between iteration step and structure complexity. The non-uniform iteration step is introduced for efficiency optimization. A real mask component is modelled as a multi-junctional waveguide structure with periodic boundary condition. Simulation results validate the effectiveness of the proposed method and efficiency benefits are discussed through comparison with other solvers including HFSS and RCWA. Results indicate that the proposed method possesses good flexibility and application significance for computational lithography problems with high complexity.

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Section: Introductionmentioning

confidence: 99%

A Hybrid Eigenmode Restoration Algorithm for Computational Lithography Problems Based on Mode Matching Principle

Liu

et al. 2022

IEEE Access

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“…The computational efficiency of FMM is improved by introducing the form of auxiliary equations [ 10 ] . In our previous works, efficient FMM methods for binary gratings [ 11 ] and ultrathin one‐dimensional periodic structures [ 12,13 ] were proposed. However, the implementation of our previous work still involves the inverse of large dimensional matrices and no explicit solution expressions are given.…”

Section: Introductionmentioning

confidence: 99%

“…This method converts boundary problems into algebraic eigenvalue problems by expanding the electromagnetic field and permittiv-ity in the grating region. Various improvements to different aspects of the method have been proposed in the literature [9][10][11][12][13]. The convergence rate is greatly improved by rearranging Maxwell's curl equations [9] .…”

Section: Introductionmentioning

confidence: 99%

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Efficient and Explicit Fourier Modal Method for Ultrathin Metallic Gratings

Li¹,

Shi²,

Jin

et al. 2022

Chinese J of Electronics

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The solution of large matrix eigenvalues and complex linear equations limits the Fourier modal method (FMM) application in ultrathin metallic gratings (UMG) analysis. This paper proposes an efficient and explicit FMM method for analyzing UMG. The proposed method avoids solving complex linear equations and eigenvalues of eigenmatrix in the conventional method by simplifying the implementation equations. Two numerical examples then verify the reliability of the proposed method compared with CST simulations and the conventional method. The proposed method is proven efficient in decreasing the CPU time by over 80% and demanding significantly less memory.

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“…The approach substantially improves the convergence of the method, but does not completely eliminate the influence of the Gibbs phenomenon, so it evolved in different directions. For example, J. Li with coauthors proposed an alternative formulation, using the Cayley-Hamilton theorem and reducing the computational time of the method [30]. K. Edee developed an alternative method using Gegenbauer polynomials instead of plane-wave decomposition [31].…”

Section: Introductionmentioning

confidence: 99%

Reformulated Fourier Modal Method with improved near field computations

Spiridonov¹,

Shcherbakov²

2021

Preprint

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In this paper we propose a new formulation of the Fourier Modal Method based on an alternative treatment of interface conditions allowing us to overcome the effect of the Gibbs phenomenon. Explicit consideration of the interface conditions for the discontinuous part of the field leads to new equations for the eigenvalue problem and the transfer matrix. The results of the method are in good agreement with the results for the classical approach based on the Li factorization rules. Moreover, the developed method allows calculating the near field much more accurately, and may find its applications in sensing and nonlinear optics.

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Efficient Implementation of Rigorous Coupled-Wave Analysis for Analyzing Binary Gratings

Cited by 9 publications

References 21 publications

A Hybrid Eigenmode Restoration Algorithm for Computational Lithography Problems Based on Mode Matching Principle

A Hybrid Eigenmode Restoration Algorithm for Computational Lithography Problems Based on Mode Matching Principle

Efficient and Explicit Fourier Modal Method for Ultrathin Metallic Gratings

Reformulated Fourier Modal Method with improved near field computations

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