2015
DOI: 10.1016/j.vacuum.2015.04.041
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Efficient passivation of solar cells by silicon nitride

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Cited by 15 publications
(7 citation statements)
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“…Figure shows the effective minority carrier lifetime ( τ eff ) of an n‐type FZ wafer with both sides symmetrically passivated by 150 nm‐thick PSS thin film. PSS SP layer achieves an τ eff value (2.3 ms at a minority carrier density of 10 15 cm −3 ) approaching that of SiN x , suggesting that PSS thin film can function as a passivation scheme simultaneously. The passivation mechanism involves PSS/Si interface properties and is discussed in another paper .…”
Section: Resultsmentioning
confidence: 93%
“…Figure shows the effective minority carrier lifetime ( τ eff ) of an n‐type FZ wafer with both sides symmetrically passivated by 150 nm‐thick PSS thin film. PSS SP layer achieves an τ eff value (2.3 ms at a minority carrier density of 10 15 cm −3 ) approaching that of SiN x , suggesting that PSS thin film can function as a passivation scheme simultaneously. The passivation mechanism involves PSS/Si interface properties and is discussed in another paper .…”
Section: Resultsmentioning
confidence: 93%
“…Those nano pits can measurably reduce reflectivity and increase light absorption. During solar cell manufacture, the SiNx depositing is a very important process because it decided the passivation effect of the solar cells [26]. On one side, the nano texture can reduce the reflectivity of silicon wafer and increase the short current of solar cells.…”
Section: Methodsmentioning
confidence: 99%
“…The a-Si: H films produced at 250 °C show better electrical characteristics than the other films (Urbach energy 51 meV, deep-state defect density 2 × 10 16 cm −3 ). El Amrani et al 104 formed SiN x films in a direct plasma pulse reactor at a low frequency of 430 kHz using a combination of pure SiH 4 and pure NH 3 , annealed them for 50 s at 750 °C in an oxygen environment. For 340 μm thick HEM polycrystalline P-type silicon wafers, the process parameters were refined.…”
Section: Substrate Temperaturementioning
confidence: 99%