2019
DOI: 10.1002/pip.3141
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Efficient silicon nitride SiNx:H antireflective and passivation layers deposited by atmospheric pressure PECVD for silicon solar cells

Abstract: This work demonstrates the efficient optical and passivation properties provided by hydrogenated silicon nitride (SiNx:H) layers deposited in a lab‐scale atmospheric pressure plasma enhanced chemical vapor deposition (AP‐PECVD) reactor. By applying modulated low‐frequency plasma (200 kHz), homogeneous SiNx:H layers, with small variances in thickness w and refractive index n (Δw ≤ 2 nm; Δn ≤ 0.02), were achieved on a surface area of 45 × 55 mm2. The use of voltage amplitude modulation enabled discharge optimiza… Show more

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Cited by 35 publications
(17 citation statements)
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“…Therefore, it is crucial to match the refractive index and thickness for each of the layers of the DLARC. Currently, the widely used ARC in photovoltaic industry is the silicon nitride coating deposited by PECVD [30]. Note that the deposition of silicon oxynitride can be achieved by simply adding nitrous oxide after inlet silane and ammonia gas during the process of silicon nitride deposition.…”
Section: Effect Of the Dlarc On Cell Performancementioning
confidence: 99%
“…Therefore, it is crucial to match the refractive index and thickness for each of the layers of the DLARC. Currently, the widely used ARC in photovoltaic industry is the silicon nitride coating deposited by PECVD [30]. Note that the deposition of silicon oxynitride can be achieved by simply adding nitrous oxide after inlet silane and ammonia gas during the process of silicon nitride deposition.…”
Section: Effect Of the Dlarc On Cell Performancementioning
confidence: 99%
“…To address these problems, the proposed approaches include the multilayer thin lms consisting of various refractive indices, 5,6 the designed dielectric micro-/nano-structures that induce a graded refractive index, [7][8][9][10][11][12][13][14][15] and the optical resonance structures for efficient light connement. [16][17][18][19][20][21][22] Furthermore, metamaterials, which do not exist in nature, can directly control the optical constants of permittivity, permeability, refractive index, and impedance and facilitate extreme optical properties such as perfect absorption, reection, and transmission.…”
Section: Introductionmentioning
confidence: 99%
“…They are mainly used as very effective antireflection coatings in the production of crystalline silicon (c-Si) and multicrystalline silicon (mc-Si) solar cells [ 1 , 2 ]. The hydrogen content in the layers effectively passivates the material’s surface and suppresser surface recombination [ 3 , 4 , 5 , 6 , 7 , 8 ]. SiN x :H layers with various levels of nitrogen content are widely used in optoelectronics.…”
Section: Introductionmentioning
confidence: 99%