Microelectromechanicalsystems (MEMS) resonators on Si have the potential to replace the discrete passive components in a power converter. The main intention of this paper is to present a ring-shaped aluminum nitride (AlN) piezoelectric micro-resonator that can be used as an energytransferring device to replace inductors/capacitors in low power resonant converters for biomedical applications.
Finite element simulation results have been provided, showing the mode of vibration at resonant frequency. The zero voltage switching (ZVS) condition for a series resonant converter incorporating the proposed MEMS resonator has been presented analytically and verified through experiment. This ZVS condition can be found in terms of the equivalent circuit parameters of the resonator. To the knowledge of the authors, ZVS analysis based on the equivalent electrical circuit model of the thin piezoelectric film resonators has not yet been reported in the literature. A CMOS-compatible fabrication process has beenproposed and implemented. In addition, the fabricated devices have been characterized and experimental results are included in the paper. The first contour mode AlN MEMS resonator with moderately low resonant frequency and motional resistance is reported in this paper with measured resonant frequency and motional resistance of 87.28 MHz and 36.728 Ω respectively.