Elastic and viscoelastic characterization of microcapsules for drug delivery using a force-feedback MEMS microgripper

Kim, Keekyoung; Liu, Xinyu; Zhang, Yong; Cheng, Ji; Wu, Xiao Yu; Sun, Yu

doi:10.1007/s10544-008-9248-6

Cited by 55 publications

(34 citation statements)

References 18 publications

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“…The devices were microfabricated using a modified deep reactive-ion etching (DRIE) on the SOI process [8] with a 25-μm-thick device silicon layer, as shown in Fig. 3.…”

Section: Three-pronged Microgrippermentioning

confidence: 99%

Active Release of Microobjects Using a MEMS Microgripper to Overcome Adhesion Forces

Chen¹,

Zhang²,

Sun

2009

J. Microelectromech. Syst.

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123

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Abstract-Due to force scaling laws, large adhesion forces at the microscale make rapid accurate release of microobjects a longstanding challenge in pick-place micromanipulation. This paper presents a new microelectromechanical systems (MEMS) microgripper integrated with a plunging mechanism to impact the microobject for it to gain sufficient momentum to overcome adhesion forces. The performance was experimentally quantified through the manipulation of 7.5-10.9-µm borosilicate glass spheres in an ambient environment under an optical microscope. Experimental results demonstrate that this microgripper, for the first time, achieves a 100% successful release rate (based on 200 trials) and a release accuracy of 0.70 ± 0.46 µm. Experiments with conductive and nonconductive substrates also confirmed that the release process is not substrate dependent. Theoretical analyses were conducted to understand the release principle. Based on this paper, further scaling down the end structure of this microgripper will possibly provide an effective solution to the manipulation of submicrometer-sized objects.[

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“…The devices were microfabricated using a modified deep reactive-ion etching (DRIE) on the SOI process [8] with a 25-μm-thick device silicon layer, as shown in Fig. 3.…”

Section: Three-pronged Microgrippermentioning

confidence: 99%

Active Release of Microobjects Using a MEMS Microgripper to Overcome Adhesion Forces

Chen¹,

Zhang²,

Sun

2009

J. Microelectromech. Syst.

Self Cite

123

View full text Add to dashboard Cite

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“…MEMS grippers are typically driven by electrostatic, electrothermal, and piezoelectric actuators 47,77 . They are made with feature structures using different fabrication methods [101][102][103][104][105] , and have been applied for various nanomanipulation tasks [106][107][108][109][110][111][112] , as summarized in Table 2. Although electrostatic actuation has low power, it requires relatively high actuation voltages.…”

Section: Sensingmentioning

confidence: 99%

Recent advances in nanorobotic manipulation inside scanning electron microscopes

et al. 2016

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A scanning electron microscope (SEM) provides real-time imaging with nanometer resolution and a large scanning area, which enables the development and integration of robotic nanomanipulation systems inside a vacuum chamber to realize simultaneous imaging and direct interactions with nanoscaled samples. Emerging techniques for nanorobotic manipulation during SEM imaging enable the characterization of nanomaterials and nanostructures and the prototyping/assembly of nanodevices. This paper presents a comprehensive survey of recent advances in nanorobotic manipulation, including the development of nanomanipulation platforms, tools, changeable toolboxes, sensing units, control strategies, electron beam-induced deposition approaches, automation techniques, and nanomanipulation-enabled applications and discoveries. The limitations of the existing technologies and prospects for new technologies are also discussed.

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“…Among examples showing a use of microtools close to the real application, Gultepe et al [14] report the ex vivo and in vivo tissue excision by microgrippers, which, however, were injected, visualized and recovered with standard equipment. Moreover, some examples of ex vivo micromanipulation in the physiological environment are reported in the literature-for example, the micro-scale compression of hydrogel microcapsules [15] or the micromanipulation of a micro blood vessel and a cyanobacteria cell [16]. The study of Micro Electro-Mechanical Systems (MEMS) microgripper for the deformability characterization of human red blood cells is also reported [17] as well as the study of MEMS tweezers for the viscoelastic characterization of soft materials, like tissues [18].…”

Section: Introductionmentioning

confidence: 99%

Innovative Silicon Microgrippers for Biomedical Applications: Design, Mechanical Simulation and Evaluation of Protein Fouling

et al. 2018

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Abstract:The demand of miniaturized, accurate and robust micro-tools for minimally invasive surgery or in general for micro-manipulation, has grown tremendously in recent years. To meet this need, a new-concept comb-driven microgripper was designed and fabricated. Two microgripper prototypes differing for both the number of links and the number of conjugate surface flexure hinges are presented. Their design takes advantage of an innovative concept based on the pseudo-rigid body model, while the study of microgripper mechanical potentialities in different configurations is supported by finite elements' simulations. These microgrippers, realized by the deep reactive-ion etching technology, are intended as micro-tools for tissue or cell manipulation and for minimally invasive surgery; therefore, their biocompatibility in terms of protein fouling was assessed. Serum albumin dissolved in phosphate buffer was selected to mimic the physiological environment and its adsorption on microgrippers was measured. The presented microgrippers demonstrated having great potential as biomedical tools, showing a modest propensity to adsorb proteins, independently from the protein concentration and time of incubation.

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Elastic and viscoelastic characterization of microcapsules for drug delivery using a force-feedback MEMS microgripper

Cited by 55 publications

References 18 publications

Active Release of Microobjects Using a MEMS Microgripper to Overcome Adhesion Forces

Active Release of Microobjects Using a MEMS Microgripper to Overcome Adhesion Forces

Recent advances in nanorobotic manipulation inside scanning electron microscopes

Innovative Silicon Microgrippers for Biomedical Applications: Design, Mechanical Simulation and Evaluation of Protein Fouling

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