The Rh/Al system has drawn significant attention as a model heterogeneous catalyst due to its unique adsorption properties. In this study, a set of samples consisting of Al substrates made of polished and etched pure metal sheets and deposited in situ with ultrathin Rh overlayers of different thickness was prepared. During the preparation of the samples, in-depth diffusion of Rh into the surface region of Al substrates obviously took place. To quantify this process, i.e. by non-destructively ascertaining the resulting depth profile of the samples, elastic peak electron spectroscopy (EPES) was employed. An EPES measurement was performed for energies of 500, 750 and 1000 eV with the initial Rh overlayer thickness in the range 3-20Å and using pure Rh and Al standards. The measurement was carried out on a precision spherical retarding-field analyser (RFA). The resulting experimental EPES intensities, as a function of the primary energy and the initial thickness of the Rh overlayer, were compared and fitted with the intensities simulated by the Monte Carlo (MC) method. An MC model of the sample surface consisting of three regions of different inelastic mean free path (IMFP) and Rh concentration were assumed: the first -Rh on the substrate top, the second -Rh/Al with exponential decay of Rh in Al and the third -pure Al. The best fit and best consistency for different primary energies were achieved under the assumption that no Rh was left on Al substrate top, but an exponentially decaying profile of Rh in Al was created at the surface.