2004
DOI: 10.1002/sia.1772
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Elastic electron backscattering from Ti: grain size effect

Abstract: Measurements of elastic electron backscattering probabilities may provide the electron inelastic mean free paths (IMFP). This technique is known as elastic peak electron spectroscopy (EPES). The IMFPs in Ti canbe determined from optical data by Tanuma et al., Gries or the TPP-2M predictive formulae. Studies on Si and Ni show a weak influence of surface roughness, but a stronger influence of atomic composition, density, texture, average grain size and surface excitations on the IMFPs. In the present work, the e… Show more

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Cited by 5 publications
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“…5,6 We have found negligible effects of silicon surface roughness, and pronounced influence of atomic composition, density, texture, and average grain size on the IMFPs, 5,6 as well as influence of surface excitations on the IMFPs recently investigated in Ti. 7 In the present work, we search for a possible influence of charge-carrier concentration on the measured elastic electron backscattering probabilities and the IMFPs in silicon samples differing in type (p-and/or n-) and level of doping, and hence in their electrical conductivity.…”
Section: Introductionmentioning
confidence: 99%
“…5,6 We have found negligible effects of silicon surface roughness, and pronounced influence of atomic composition, density, texture, and average grain size on the IMFPs, 5,6 as well as influence of surface excitations on the IMFPs recently investigated in Ti. 7 In the present work, we search for a possible influence of charge-carrier concentration on the measured elastic electron backscattering probabilities and the IMFPs in silicon samples differing in type (p-and/or n-) and level of doping, and hence in their electrical conductivity.…”
Section: Introductionmentioning
confidence: 99%