2003
DOI: 10.1063/1.1539924
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Elastic instability of nanomechanical beams

Abstract: We report on elastic instability of nanomechanical SiO2 beams with widths 20 nm<d<110 nm and lengths 5 μm<L<10 μm. The beams are fabricated from a silicon substrate with a 500 nm thermal oxide layer. After release from the silicon substrate by reactive ion etching the beams buckle due to the residual Si/SiO2 strain. The measured buckling displacements of the beams are compared with the predictions of nonlinear continuum elasticity theory. We observe a continuous buckling transition,… Show more

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Cited by 38 publications
(43 citation statements)
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“…38 Our approach is more general than other approaches used for studying the second-order buckling transition. 39,40 Note that recently there is a growing interest in the buckling of small rods in the context of, e.g., mechanical properties and stability of carbon nanotubes, 41-45 multilayers, 46 biopolymers, 47,48 DNA, 49,50 and fracture. 51,52 A nice modern introduction to the application of buckling to pattern formation in physical and biological systems can be found in Ref.…”
Section: B Novel Order Parameters To Describe Magnetic and Mechanicamentioning
confidence: 98%
“…38 Our approach is more general than other approaches used for studying the second-order buckling transition. 39,40 Note that recently there is a growing interest in the buckling of small rods in the context of, e.g., mechanical properties and stability of carbon nanotubes, 41-45 multilayers, 46 biopolymers, 47,48 DNA, 49,50 and fracture. 51,52 A nice modern introduction to the application of buckling to pattern formation in physical and biological systems can be found in Ref.…”
Section: B Novel Order Parameters To Describe Magnetic and Mechanicamentioning
confidence: 98%
“…The released disk is compressed and an estimate based on the theory of elastic stability 18 shows that buckling should occur when the radius of the undercut exceeds 6 m ͑calculated for the built-in stress and thickness of our film͒. The asymmetry of the real system in the vertical direction may provide earlier buckling 19 and also leads to preferential upbuckling, preventing the released membrane from snapping into the substrate. The total timing of the wet etch determines the outer diama͒ Electronic…”
mentioning
confidence: 99%
“…Where comparably sized electro-thermal actuators require temperatures greater than 1000 • C [2], similar deflections can be achieved through buckling at temperatures of less than 100 • C. This amplification allows relatively low temperature increases from the heat source to efficiently drive the actuation mechanism in the adaptive valve. The buckling instability of microfabricated beams has been previously investigated by McCarthy et al [3], Carr and Wybourne [4] and Chiao and Lin [5] where beams were compressed and buckled under various loading mechanisms.…”
Section: Introductionmentioning
confidence: 98%