Thermal buckling of eccentric microfabricated nickel beams as temperature regulated nonlinear actuators for flow control

McCarthy, Matthew; Tiliakos, Nicholas; Modi, Vijay; Fréchette, Luc

doi:10.1016/j.sna.2006.05.027

Cited by 23 publications

(20 citation statements)

References 8 publications

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“…At low temperature (20-40°C), the relation between the axial expansion of sample and temperature is no more linear and a lower slope is observed. This may be due to default and prestress appearing during fabrication process (McCarthy et al 2006). A stress gradient occurs over the microcantilever during the microfabrication process.…”

Section: Axial Expansion Of a Thermal Actuated Microcantilevermentioning

confidence: 99%

Mechanical and tribological characterization of a thermally actuated MEMS cantilever

2012

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The temperature effect on the mechanical and tribological behaviors of a microelectromechanical systems cantilever is experimentally investigated using an atomic force microscope. A nonlinear variation of the bending stiffness of microcantilevers as a function of temperature is determined. The variation of the adhesion force between the tip of atomic force microscope (AFM) probe (Si 3 N 4 ) and the microcantilever fabricated in gold is monitored at different temperatures. Using the lateral mode operation of atomic force microscope, the influence of temperature on friction coefficient between the tip of AFM probe and microcantilever is presented. Finite element analysis is used to estimate the thermal field distribution in microcantilever and the axial expansion.

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Section: Axial Expansion Of a Thermal Actuated Microcantilevermentioning

confidence: 99%

Mechanical and tribological characterization of a thermally actuated MEMS cantilever

2012

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“…Moreover, the dependence of the mechanical resonance frequency on laser power is found to be non-monotonic [38]. These findings are attributed to optically induced thermal strain in the beam, which gives rise to compressive stress that may result in buckling [39][40][41][42][43][44]. Bagheri et al.…”

Section: Introductionmentioning

confidence: 99%

Optomechanical Cavity With a Buckled Mirror

Yuvaraj

Kadam

Shtempluck

et al. 2013

J. Microelectromech. Syst.

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We study an optomechanical cavity, in which a buckled suspended beam serves as a mirror. The mechanical resonance frequency of the beam obtains a minimum value near the buckling temperature. Contrary to the common case, in which self-excited oscillations of the suspended mirror are optically induced by injecting blue detuned laser light, in our case self-excited oscillations are observed with red detuned light. These observations are attributed to a retarded thermal (i.e. bolometric) force acting on the buckled mirror in the inwards direction (i.e. towards to other mirror). With relatively high laser power other interesting effects are observed including period doubling of self-excited oscillations and intermode coupling.

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“…This is because the fabrication processes for the in-plane actuators are considerably different from that of the out-of-plane actuators. For out-of-plane motion, structures in height are needed, so at least two or more layers are needed to be stacked up and combined together for the out-of-plane motion as shown in bimorph or multi-morph actuators [11,12]. But, most in-plane actuators don't need multiple layers for their operation [8].…”

Section: Introductionmentioning

confidence: 99%

“…By utilizing a buckling mode, the out-of-plane motion can be achieved without a special fabrication process. But most buckling modes are bi-stable and a little bit unpredictable, so it is not easy to control the actuator at a desired position between bi-stable positions accurately [11]. This paper presents the design, fabrication and testing of an electrothermal actuator for out-of-plane motion.…”

Section: Introductionmentioning

confidence: 99%

Design, fabrication and characterization of a single-layer out-of-plane electrothermal actuator for a MEMS XYZ stage

Kim

Dagalakis

Gupta

2012

Proceedings of the Workshop on Performance Metrics for Intelligent Systems

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This paper presents the design, fabrication and characterization of a single-layer out-of-plane electrothermal actuator based on MEMS (Micro-Electro-Mechanical System). The proposed electrothermal actuator is designed to generate motions along the out-of-plane or normal to a wafer by a Joule heating when the current flows through the actuator. This out-of-plane electrothermal actuator is based on a single layer of a SOI (Silicon on Insulator) wafer and two notches near the middle of the actuator beams. Due to these notches, the thermal expansion of the beams in the actuator generates an eccentric loading, which converts into the bending of the beams. This bending of the beam finally generates the out-of-plane motion at the middle of the beam. This behavior is described by the prepared analytic equations and compared by the results from FEM (Finite element Model) analysis. With fabricated samples, a 30 m displacement is measured along out-of-plane at 5 V driving voltage. The 1st mode of the resonant frequency for the out-of-plane motion is expected to occur at 74.9 kHz from FEA. The proposed actuator is based on the standard SOI-MUMPs (SOI-Multi User Manufacturing Process) , so it has good integration capability with other system employing same fabrication techniques. To test its integration capability, a MEMS XYZ stage is fabricated by embedding the proposed out-of-plane electrothermal actuator onto an existing MEMS XY stage. The range of motion of the fabricated XYZ stage is measured about 35 m x 35 m x 30 m along X, Y and Z axes without any changes on its fabrication process.

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Thermal buckling of eccentric microfabricated nickel beams as temperature regulated nonlinear actuators for flow control

Cited by 23 publications

References 8 publications

Mechanical and tribological characterization of a thermally actuated MEMS cantilever

Mechanical and tribological characterization of a thermally actuated MEMS cantilever

Optomechanical Cavity With a Buckled Mirror

Design, fabrication and characterization of a single-layer out-of-plane electrothermal actuator for a MEMS XYZ stage

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