Elastic mapping of sub-surface defects by ultrasonic force microscopy: limits of depth sensitivity

Geisler, H.; Hoehn, M; Rambach, Martin; Meyer, M.; Zschech, Ehrenfried; Mertig, Michael; Романов, А. Е.; Bobeth, M.; Pompe, W.; Geer, Robert

doi:10.1201/9781351074629-114

Cited by 3 publications

(1 citation statement)

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“…In [20], a GaAs grating buried under a polymeric layer is clearly imaged using Scanning Local Acceleration Microscopy. Changes in contact stiffness of cavities in Si within about 200 nm from the Si(100) surfaces have been detected using UFM [53]. In [30], Au particles with a diameter of 15-20 nm buried under a 500-nm polymeric film have been observed using Scanning Near-Field Ultrasound Holography.…”

Section: Ufm Imagesmentioning

confidence: 99%

Mechanical Diode-Based Ultrasonic Atomic Force Microscopies

Cuberes¹

Applied Scanning Probe Methods XI

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Abstract. Recent advances in mechanical diode-based ultrasonic force microscopy techniques are reviewed. The potential of Ultrasonic Force Microscopy (UFM) for the study of material elastic properties is explained in detail. Advantages of the application of UFM in nanofabrication are discussed. Mechanical-Diode Ultrasonic Friction Force Microscopy (MD-UFFM) is introduced, and compared with Lateral Acoustic Force Microscopy (LAFM) and Torsional Resonance (TR) -Atomic Force Microscopy (AFM). MD-UFFM provides a new method for the study of shear elasticity, viscoelasticity, and tribological properties on the nanoscale. The excitation of beats at nanocontacts and the implementation of Heterodyne Force Microscopy (HFM) are described. HFM introduces a very interesting procedure to take advantage of the time resolution inherent in high-frequency actuation.

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Section: Ufm Imagesmentioning

confidence: 99%