Elastomer mask for powder blasting microfabrication

Sayah, A.; Parashar, V.K.; Pawlowski, A.-G.; Gijs, Martin A. M.

doi:10.1016/j.sna.2005.06.009

Cited by 34 publications

(25 citation statements)

References 19 publications

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“…In space exploration, micrometeoroids present both an object for investigation 1 and a hazard to spacecraft 2 . In many earthly technologies microparticle impact often poses a problem by causing erosion, but can also be put to a good use, for example in powder blasting 3 and cold spraying 4 . In medicine and biology ballistic microparticles are used for needle–free gene and drug delivery 5 .…”

mentioning

confidence: 99%

Dynamics of supersonic microparticle impact on elastomers revealed by real–time multi–frame imaging

Veysset

Hsieh

Kooi

et al. 2016

Sci Rep

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Understanding high–velocity microparticle impact is essential for many fields, from space exploration to medicine and biology. Investigations of microscale impact have hitherto been limited to post–mortem analysis of impacted specimens, which does not provide direct information on the impact dynamics. Here we report real–time multi–frame imaging studies of the impact of 7 μm diameter glass spheres traveling at 700–900 m/s on elastomer polymers. With a poly(urethane urea) (PUU) sample, we observe a hyperelastic impact phenomenon not seen on the macroscale: a microsphere undergoes a full conformal penetration into the specimen followed by a rebound which leaves the specimen unscathed. The results challenge the established interpretation of the behaviour of elastomers under high–velocity impact.

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mentioning

confidence: 99%

Dynamics of supersonic microparticle impact on elastomers revealed by real–time multi–frame imaging

Veysset

Hsieh

Kooi

et al. 2016

Sci Rep

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“…More details of processing the photosensitive material can be found in previous work [30]. The elastomer presents a good erosion resistance to powder blasting [28]. Moreover, due to its photosensitive nature, photolithography can be used to fabricate the mask directly on the glass substrate.…”

Section: Methodsmentioning

confidence: 99%

“…This technique has shown its potential to pattern many brittle materials such as glass, ferrite, silicon and lead zircone titanate (PZT) [24][25][26][27]. Using a photosensitive elastomer, photolithography can be used to fabricate masks that resist powder blasting [28]. Moreover, it is found that the eroded depth depends on the mask feature size [29].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of microfluidic mixers with varying topography in glass using the powder-blasting process

Sayah

Thivolle

Parashar

et al. 2009

J. Micromech. Microeng.

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The powder-blasting method is used to fabricate structures with a three-dimensional topography in glass using elastomeric masks. The relation between the mask opening width and the erosion depth is exploited to fabricate microstructures with varying depth in a single micropatterning step. As an application, planar three-dimensional micro-mixers were fabricated, which consist of a repeating convergent microfluidic nozzle structure. Three different designs of the micro-mixers were considered. The mixing of co-flowing laminar streams results from the generation of multiple vortices at the exit of the different convergent nozzles.

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“…Eventually, the surface is weakened enough by the cracks to create chips that can be removed. A mask, made out of metal or plastic [1,2] , is used to prevent unwanted machining and to realise well defined features.…”

Section: Introductionmentioning

confidence: 99%

Reliability improvement of a powder blasting process for micro-machining applications

Lacrotte

Wilhelm

Desmulliez

2010

3rd Electronics System Integration Technology Conference ESTC

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The improvement on an existing powder blasting machine is presented and characterised in this paper. The original prototype suffered from irregular powder clogging during real time utilisation, especially with very fine particles. Moreover, the fluctuations of the flow of particle generated were not ideal for micro-machining purposes. We demonstrate that the re-engineering of the original reservoir used with freshly dried powder brings reliability and more consistency in the powder flow rate. This improvement is easy to implement in the original design and does not need to re-engineer the entire machine. For this study, very fine powder with average particle diameter of 9 fJlli was used.

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Elastomer mask for powder blasting microfabrication

Cited by 34 publications

References 19 publications

Dynamics of supersonic microparticle impact on elastomers revealed by real–time multi–frame imaging

Dynamics of supersonic microparticle impact on elastomers revealed by real–time multi–frame imaging

Fabrication of microfluidic mixers with varying topography in glass using the powder-blasting process

Reliability improvement of a powder blasting process for micro-machining applications

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