2006
DOI: 10.1063/1.2354009
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Electric conductivity of boron nitride thin films enhanced by in situ doping of zinc

Abstract: The authors demonstrate that the electric conductivities of cubic and hexagonal boron nitride (c-BN and h-BN) thin films increased markedly by the in situ doping of zinc. The doped films were electrically semiconducting, and conductivities at room temperature increased from 10−8to10−2Ω−1cm−1 with increasing zinc concentration from 400to20000ppm. Activation energies for electric conduction (Ec) of c-BN decreased from 0.3to0.1eV with increasing zinc concentration, suggesting feasible shallow-level doping. On the… Show more

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Cited by 96 publications
(48 citation statements)
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“…Recently, some work have investigated the effect of point defects on the high-temperature conductivity and dielectric loss of h-BN. [9][10][11][12] For bulk h-BN, the increase in the conductivity and subsequent dielectric loss with temperature was linked to thermal excitation of B vacancies and oxygen ionic substitutional and midplane defects. 9,12 Besides, a larger amount of defects was related to a higher conductivity in turbostratic BN thin films, 10 and to a larger activation energy in Zn-doped h-BN compared to c-BN thin films.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Recently, some work have investigated the effect of point defects on the high-temperature conductivity and dielectric loss of h-BN. [9][10][11][12] For bulk h-BN, the increase in the conductivity and subsequent dielectric loss with temperature was linked to thermal excitation of B vacancies and oxygen ionic substitutional and midplane defects. 9,12 Besides, a larger amount of defects was related to a higher conductivity in turbostratic BN thin films, 10 and to a larger activation energy in Zn-doped h-BN compared to c-BN thin films.…”
Section: Introductionmentioning
confidence: 99%
“…Hexagonal boron nitride (h-BN) is a thermally and chemically highly stable wide-band-gap ($4-7 eV) 1 material, whose optical 1-8 and thermoelectrical [9][10][11][12] properties strongly depend upon the occurrence and nature of point defects within its sp 2 -bonded honeycomb structure. Many of the technological uses of h-BN are therefore subject to the identification and quantification of the type and concentration of such defects, which ultimately determine the electronic structure of the material.…”
Section: Introductionmentioning
confidence: 99%
“…2D BN, and their nanoribbons can be easily functionalized by many different ways for different purposes such as doping [15][16][17] , exchange of atoms and vacancies.…”
mentioning
confidence: 99%
“…Electrical properties of Be-implanted polycrystalline cBN films were also studied by He et al [14]. Yoshida and Nose et al, reported semiconducting properties of Mg-and Zn-doped cBN thin films [15][16][17]. Recently, electrical transport properties of Si-doped cBN thin films were reported by Ying et al [18].…”
Section: Introductionmentioning
confidence: 91%