ELECTRIC CONDUCTIVITY OF Sb/Se THIN FILM MICRO-SCALE STRUCTURES

Abstract

Research into the phase change transition (PCT) from amorphous to crystalline state in chalcogenide glass semiconductors is often more associated with large-scale samples. The authors present a micro-scale structural model of the Sb/Se thin films. They have also extended the investigations of photo-and thermostimulated inter-diffusion and PCT effects between two adjacent layers. The results show that the optical and electrical characteristics of such a film change simultaneously. It has been found that the electric conductivity of the films increases 3 times during a PCT process.

Selective Wet-Etching of Amorphous/Crystallized Sb-Se Thin Films

“…1a). It is well known that heating as well as laser irradiation of Sb-Se films results in crystallization of the amorphous regions [11,13,14]. In our experiment, after laser exposure the Se and Sb 40 Se 60 crystallites were produced in the samples with an excess of selenium, while in those with a stoichiometric Sb/Se ratio only Sb 40 Se 60 crystallites were obtained.…”

Electron beam induced surface modification of amorphous Sb2Se3 thin film

“…This implies that crystallized band appears at the centre and then expands radially. The sheet resistance difference of Sb x Se 100-x films before and after transformation (crystallization) is larger than 10 4 Ω per square [9,10]. Crystallization process leads to a catastrophic reduction of the Coulomb forces; the difference in pressure at dimple bottom and sides is formed.…”