2014
DOI: 10.1063/1.4882375
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Electrical and optical characterization of Au/CaF2/p-Si(111) tunnel-injection diodes

Abstract: Metal/CaF2/p-Si(111) capacitors with the improved-quality several-nanometer-thick epitaxial fluorite films are examined, aiming at solidifying a candidacy of this material for barrier layers in silicon devices. Structural and transport properties of a thin crystalline dielectric are characterized by different experimental techniques. The measured current-voltage characteristics accompanied with simulation results demonstrate that the elastic tunneling electron injection takes place in the considered structures… Show more

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Cited by 25 publications
(16 citation statements)
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“…The CaF 2 film was grown on this surface by MBE at 250 °C, which is known to be the optimum temperature to produce pinhole-free homogeneous CaF 2 layers. [30] The deposition rate of CaF 2 measured by a quartz oscillator was ≈1.3 nm min −1 . The growth processes and crystalline quality of the CaF 2 layers were monitored using reflection high-energy electron diffraction, with an electron energy of 15 keV.…”
Section: Methodsmentioning
confidence: 99%
“…The CaF 2 film was grown on this surface by MBE at 250 °C, which is known to be the optimum temperature to produce pinhole-free homogeneous CaF 2 layers. [30] The deposition rate of CaF 2 measured by a quartz oscillator was ≈1.3 nm min −1 . The growth processes and crystalline quality of the CaF 2 layers were monitored using reflection high-energy electron diffraction, with an electron energy of 15 keV.…”
Section: Methodsmentioning
confidence: 99%
“…Crystalline materials theoretically provide the largest potential for obtaining defect-free insulators and overcoming problems associated with both interface quality and defect bands. The most promising results for 2D FETs have recently been obtained for crystalline layered 2D insulators, in particular hBN 108,125 and mica 126 , as well as the ionic crystal CaF 2 46,62,127,128 . These materials and some other known fluorides are summarized in Fig.…”
Section: Future Development Of 2d Electronicsmentioning
confidence: 99%
“…Relevant interest remains to recognize and understand proper defect formation . It is applied to chemical sensors and gains importance for electronic applications . However, sustaining demand for high‐power and high‐energy‐density battery systems has spurred extensive research in developing novel electrode and electrolyte materials for next‐generation battery systems .…”
Section: Introductionmentioning
confidence: 99%