Electrical and optical properties of LiNbO3

All‐Solid‐State Lithium‐Ion Microbatteries: A Review of Various Three‐Dimensional Concepts

“…Therefore many methods have been described to form fi lms of these materials, which include for LiNbO 3 solgel deposition methods, [ 91 ] pulsed laser deposition, [ 92 ] chemical vapor deposition [ 93 ] and sputter deposition. [ 94 ] Also for LiTaO 3 pulsed laser deposition, [ 95 ] sol-gel deposition, [ 96 ] chemical vapor deposition [ 97 ] and sputter deposition [ 98 ] were reported.…”

All inorganic thin film electrochromic device using LiPON as the ion conductor

“…The integrated visible and solar transmission values are given by [26] T T d d sol, vis sol, vis / sol, vis…”

Thin film of lithium niobium oxynitride as ionic conductor

“…Samples prepared in pure argon or mixtures of argon and oxygen have of around 5ϫ10 Ϫ9 S cm Ϫ1 , which is comparable to previously published results on lithium-niobium-oxide films. 8 We also remarked that the oxygen presence did not have any notable effect on film properties, however, samples deposited in gas mixtures containing nitrogen, which are presumably lithium-niobiumoxynitride films, have ionic conductivity increased by about two orders. Furthermore, this is coupled with a strong decrease of the activation energy from 0.7 to 0.5 eV.…”

“…Such films have been extensively studied in our lab and proved to be promising candidates as ion conducting layers in various microionic devices. 8,9 II. EXPERIMENTAL PROCEDURES Thin films of lithium niobium oxynitride were deposited by rf magnetron sputtering in an atmosphere of argon and nitrogen, using a lithium niobium oxide target ͑LiNbO 3 , purity 99.9%, Cerac, Inc.͒.…”