Thin film of lithium niobium oxynitride as ionic conductor

Abstract

A novel glassy ionic conductor, lithium niobium oxynitride, was prepared in form of thin films and characterized. Thin-film deposition was carried out by rf magnetron sputtering of LiNbO3 target in nitrogen-containing atmosphere. These films exhibit ionic conductivity of two orders higher than that of LiNbO3 films, the room-temperature conductivity being about 5×10−7 S cm−1. Film structure is highly cross linked, leading to activation energy as low as 0.5 eV. Film transmittance is higher than 85% in both the visible and solar ranges, making them also suitable for use in electrochromic devices.