2016
DOI: 10.7567/jjap.55.04eg06
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Electrical characteristics of Au/Ni Schottky diodes on cleaved m-plane surfaces of free-standing n-GaN substrates

Abstract: We report electrical characteristics of 12 Ni Schottky contacts formed on an m-plane surface, which is a cleaved side surface of a c-plane free-standing n-GaN wafer. We observed a variety of distributions of surface steps with heights up to 5 nm in the contact area. The Schottky barrier heights obtained from current–voltage, capacitance–voltage, and photoresponce results distribute in a small range of 0.67–0.79 eV. The n-value is as good as 1.01 to 1.04. Independent of the step height, the barrier height and n… Show more

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Cited by 19 publications
(15 citation statements)
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References 28 publications
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“…The calculated SBD properties reported in Table 1, f B (I-V) are similar to the values previously reported in Ref. [12], which investigated an m-plane SBD directly fabricated onto an m-plane substrate. However, f B (C-V) are different from the values in Ref.…”
Section: Resultssupporting
confidence: 85%
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“…The calculated SBD properties reported in Table 1, f B (I-V) are similar to the values previously reported in Ref. [12], which investigated an m-plane SBD directly fabricated onto an m-plane substrate. However, f B (C-V) are different from the values in Ref.…”
Section: Resultssupporting
confidence: 85%
“…However, f B (C-V) are different from the values in Ref. [12]. This result indicates that our samples have in-plane distribution of electric characteristics.…”
Section: Resultscontrasting
confidence: 81%
See 1 more Smart Citation
“…The q ϕ B for the m‐plane (0.76 eV) was found to be 0.16 eV smaller than that for the c‐plane (0.92 eV). These values were close to the reported values . The series resistance R is expressed as R = R epi + R sub + R c , where R epi , R sub , R c , stand for the resistance of the epitaxial layer, substrate, and contact.…”
Section: Resultssupporting
confidence: 89%
“…The first demonstration of a nonpolar electronic device was by Fujiwara et al who showed an enhancement‐mode m‐ plane AlGaN/GaN heterojunction field‐effect transistors (HFETs) on Fe‐doped GaN buffer layers. Naganawa et al also reported the first Schottky barrier diodes (SBDs) on m‐ plane obtained by a cleaved surface from a c‐ plane substrate. However, the background carrier concentration in some nonpolar substrates is very high (>1 × 10 17 cm −3 ) due to high unintentional impurity levels on m‐ plane .…”
Section: Successes and Challengesmentioning
confidence: 99%