Electrical Characterization and Measurements of Sin Thin Films On Crystalline Silicon Substrates By Pecvd

Periodic sub-wavelength surface-relief structures for antireflection

“…A single or mu ltilayer dielectric AR coating has been studied and applied in industry. A single layer silicon nitride AR coating is easy to be fabricated by PECVD [2], but this technique cannot be employed due to the narrow band and narrow incident angle. To achieve broadband antireflection performance by fabricating mu ltilayer films, the thicknesses and optical constant of films must be well controlled [3] To analyze the diffraction characteristics of the structures of Fig.…”