1989
DOI: 10.1117/12.953082
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Electrical Defect Monitoring For Process Control

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“…The sensitivity function h,(:c) describes the probability of a defect of a certain size :I: causing a hard fault, which is completely dependent on the layout of the circuit [15], [16].Since the core of the VMX monitor is very regular and the influence of the edges may be neglected because of the small feature sizes and the relatively large area, the sensitivity of the monitor can be approximated by the following analytical expressions: s 5 :I: 5 (2s + w)(8) s + 'W '…”
mentioning
confidence: 99%
“…The sensitivity function h,(:c) describes the probability of a defect of a certain size :I: causing a hard fault, which is completely dependent on the layout of the circuit [15], [16].Since the core of the VMX monitor is very regular and the influence of the edges may be neglected because of the small feature sizes and the relatively large area, the sensitivity of the monitor can be approximated by the following analytical expressions: s 5 :I: 5 (2s + w)(8) s + 'W '…”
mentioning
confidence: 99%