Electrical Performance of Alumina Thin Films for High-Temperature Pressure Cells With a Metallic Body

Fricke, S.; Friedberger, Alois; Müller, Gerhard; Brode, W.; Seidel, H.; Schmid, U.

doi:10.1109/jsen.2009.2036447

Cited by 7 publications

(1 citation statement)

References 22 publications

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“…However, many applications, such as environmental monitoring industrial process control, aerospace, petrochemical, and combustion process monitoring in power generation plants [1][2][3], operate in harsh environments such as high temperatures. Conventional sensor technology often fails at such temperatures and cannot withstand all the harsh requirements of such applications, such as higher operating temperatures, higher thermal and mechanical stability, and higher sensitivity [4,5]. To this end, Ref.…”

Section: Introductionmentioning

confidence: 99%

MEMS Shielded Capacitive Pressure and Force Sensors with Excellent Thermal Stability and High Operating Temperature

Ghanam

Goldschmidtboeing

Bilger

et al. 2023

Sensors

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In this paper, we present an innovative manufacturing process for the production of capacitive pressure and force sensors with excellent thermal stability for high-temperature applications. The sensors, which are manufactured from a stack of two silicon chips mounted via with gold–silicon (Au-Si) or aluminum–silicon (Al-Si) eutectic bonding, are shielded, miniaturized, and allow an operating temperature of up to 500 °C. Compared to conventional methods, the greatest benefit of the manufacturing process is that different sensor dimensions can be produced in the same batch for a wide measuring range, from mN to kN. The characterization of the realized sensors shows a high linearity and a low temperature drift of 99.992% FS and −0.001% FS/K at 350 °C, as well as a nonlinearity of 0.035% FS and a temperature drift of −0.0027% FS/K at 500 °C.

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