Electrical probing for dimensional micro metrology

Hoffmann, J.; Weckenmann, Albert; Sun, Z.

doi:10.1016/j.cirpj.2008.06.002

Cited by 18 publications

(6 citation statements)

References 11 publications

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“…A tunnel current is a quantum electrical near-field phenomenon, where tunneling current flows when the measurement surface and probe tip are close. STM enables us to image a surface at an atomic scale; therefore, a microprobe system using this principle can be expected to have a high resolution [133][134][135][136]. For the microprobe system, a spherical probe tip was used, thus allowing isotropic sensitivity to be measured on a surface in any 3D direction.…”

Section: Tunnel Current Microprobementioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.

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Section: Tunnel Current Microprobementioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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“…In this case, the z-interferometer values from the NMM-1 represent the height deviations of the specimen [4]. As any part of the spherical stylus tip (except for the part joined with the stylus shaft) can be used for electrical probing of specimen and behaves isotropic, this sensor is possible to apply for the tasks of 3D coordinate measurement [5]. By using the single point measurement instruction of NMM-1 with a predefined surface normal vector the form deviations of the work pieces can be calculated from the sensor distance signal in the probing direction and the interferometer values from the NMM-1.…”

Section: Development Of a 3d Electrical Near-field Probing Systemmentioning

confidence: 99%

3.1.2 - Development of a 3D capable probing system based on electrical near-field interactions for micro- and nanocoordinate metrology

Sun¹,

Hausotte²

2016

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Die messtechnische Erfassung von Bauteilen der Mikrosystemtechnik und von Komponenten mit Mikrostrukturen stellt die Mikro-und Nanomesstechnik durch stetig kleiner werdende Strukturgrößen und steigende Aspektverhältnisse der Strukturen vor große Herausforderungen. Hierfür sind nanometerauflösende, 3-D-fähige Messverfahren sowie entsprechende 3-D-Positioniersysteme und Antastsensoren erforderlich. An der Friedrich-Alexander-Universität Erlangen-Nürnberg wird ein mechanisch-berührungsloses, subnanometerauflösendes 3-D-Mikrotastsystem auf Basis elektrischer Nahfeldwechselwirkungen entwickelt und untersucht. Das System wird als Tastsystem einer Nanopositionier-und Nanomessmaschine NMM-1 eingesetzt. Zur Erhöhung der Messdynamik und Erweiterung der Einsatzmöglichkeiten wurde das Tastsystem um einen piezoelektrischen 3-D-Nanopositionierer und eine 3-D-Antastvektorermittlung aus dem Sensorsignal erweitert.

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“…However, this method has many limitations including touch probes which can damage subtle parts at the point of contact, and the speed of actualization for digitization is very limited [12 -14]. In addition, optical probing in CMM has limitations in measuring the surface slope height so that it has poor lateral resolution due to diffraction [14,15]. CMM is quite expensive and large in size so that recently developed some of the latest models that are more economical and compact models [16,17].…”

Section: Introductionmentioning

confidence: 99%

Investigation the Effects of Cutting Parameters on Geometric Accuracy of Machining Marine Propeller using 3D Photo-scanning Technique

Huda¹,

Jauhari²,

Yuliansyah³

et al. 2020

Wseas Transactions on Applied and Theoretical Mechanics

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The measurement method and analysis experiences of 3D scanning instrument used in manufacturing industry is a novel for recent company before we are going to apply the 4.0 industrial era. The research purpose is to provide a measurement and analysis results of quality control and product improvement stage in the third industrial era. This paper presents an approach for accuracy measurement of complete scanning complex geometric of marine propeller blades. The geometric accuracy of marine propeller models, which has been finished by machining processes are measured using 3D photo-scanning technique. The effects of cutting parameters, that is step-overs and feed-rates, on the geometric accuracy are investigated. Inspection of geometric accuracy is performed by comparing the result of 3D scanning measurement of finished propeller with CAD design data. The results showed that greater step-over value, the deviation value tends to be smaller. Similar to the feed-rates, greater value of the feed-rates, the deviation value tends to be smaller

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Electrical probing for dimensional micro metrology

Cited by 18 publications

References 11 publications

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

3.1.2 - Development of a 3D capable probing system based on electrical near-field interactions for micro- and nanocoordinate metrology

Investigation the Effects of Cutting Parameters on Geometric Accuracy of Machining Marine Propeller using 3D Photo-scanning Technique

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