We investigated the electrical properties and reverse leakage mechanisms of Pt/n-Ge Schottky contacts with copper phthalocyanine (CuPc) as an interlayer. The current-voltage (I-V) and capacitance-voltage (C-V) characteristics of the Schottky contacts were used to evaluate Schottky barrier parameters such as ideality factor, barrier height, and series resistance. The barrier heights and ideality factors measured from the forward bias I-V characteristics were found to be 0.50 eV and 1.06 for Pt/n-Ge Schottky contact, and 0.58 eV and 1.31 for Pt/CuPc/n-Ge Schottky contact, respectively. Cheung method was used to measure the series resistances of the Schottky contacts, and the consistency was checked using the Norde method. The reverse leakage conduction mechanism of the Schottky contacts was investigated. Pt/CuPc/n-Ge Schottky contacts showed a transition from Schottky emission to Poole-Frenkel emission at a higher bias range. This could be associated with the high density of structural defects or traps associated with the organic material. Germanium (Ge) is a promising channel material for nextgeneration high mobility complementary metal-oxide-semiconductor (CMOS) devices in terms of overcoming the scaling limits of its Si counterpart. 1 Recently, there has been renewed interest in metalGe Schottky contacts for the following reasons: (1) Ge has double the electron mobility and four times the hole mobility in low electric fields compared to Si, thus making high speed complementary field effect transistors (FETs) a possibility; 2 (2) Ge plays a main role in very large scale integrated (VLSI) technology due to its compatibility with main stream Si; 3 and (3) metal-semiconductor (MS) contacts play an important role in the performance of semiconductor devices due to their potential application in various electronic and optoelectronic devices such as microwave diodes, Schottky barrier metal-oxide-semiconductor field-effect transistors (SB-MOSFETs), solar cells, chemical sensors, and photo detectors. 4-6 Due to the technological importance of the Schottky barrier diodes (SBDs), a full understanding of the nature of their electrical characteristics is of great interest. Many SBDs are not intimate MS contacts; rather, they have a metal-interfacial layer-semiconductor structure unless specially fabricated. It is well known that the electrical characteristics of SBDs are controlled mainly by its interfacial layer. The interfacial layer formed at the interface between metal and semiconductor substrate has a rectification behavior in which the values of barrier height and ideality factor are greater than in conventional metal/semiconductor structures. This behavior has been attributed to the space charge region of the semiconductor, which is influenced by the interfacial layer in metal/semiconductor structures.Until now, many researchers have investigated the formation of metal/Ge Schottky systems. Dimoulas et al. 7 and Nishimura et al. 8 investigated current-voltage (I-V) characteristics of various metal/Ge junctions. They rep...