“…Moreover, MgO has a little mismatch with the SiC, which is about 3% for the MgO(111) and SiC(0001) surfaces, allowing the preparation of a high-quality MgO-gate [4]. There are several ways to grow MgO layers, including molecular beam epitaxy, atomic layer deposition, or magnetron sputtering [4][5][6][7]. Many factors can affect the insulator/semiconductor interface properties, including substrate surface cleanliness, surface stoichiometry, number of defects in a substrate, quality of adlayers, and thin film deposition method.…”