2004
DOI: 10.1063/1.1651658
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Electrical properties of Pt contacts on p-GaN activated in air

Abstract: In this study, the electrical properties of Pt contacts on p-type GaN (p-GaN) activated in air were investigated. From the observed photoluminescence result, it is suggested that the hydrogenated Ga vacancies (i.e., VGaH2) were formed during the activation process. However, VGaH2 in p-GaN near the surface was transformed into VGa after Pt deposition, because Pt strongly absorbed hydrogen. A large number of VGa at the Pt/p-GaN interface would lead to the pinning of the Fermi level at 0.3 eV above the valence-ba… Show more

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Cited by 11 publications
(5 citation statements)
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“…On the other hand, successful GaN based devices require reliable Ohmic and Schottky contacts to GaN [4][5][6][7]. Fabrication of electrical contacts to devices requires the deposition of metals on semiconductors with subsequent annealing.…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand, successful GaN based devices require reliable Ohmic and Schottky contacts to GaN [4][5][6][7]. Fabrication of electrical contacts to devices requires the deposition of metals on semiconductors with subsequent annealing.…”
Section: Introductionmentioning
confidence: 99%
“…The I -V curve obtained is linear for the samples from group C, while it has nonlinear curvature for the samples from group A or B. It indicates that ohmic performance can be obtained for the Al/Ti/n-AlGaN sample from group C. Then the specific contact resistance was measured using the TLM applied to a structure with the gap spacing between 5 and 60 µm [17,18]. The associated resistance as a function of the gap spacing for the Al/Ti/n-AlGaN sample from group C can be obtained.…”
Section: Resultsmentioning
confidence: 96%
“…On the other hand, the specific contact resistance was measured by the transmission line method (TLM) [16]. TLM patterns were performed using standard photolithography and lift-off techniques [16][17][18]. Ti/Al was used as the electrode, deposited on top of the n-AlGaN sample from group A, B or C. Ti(50 nm)/Al(150 nm) contacts were formed by a SC5750 sputter coater.…”
Section: Methodsmentioning
confidence: 99%
“…The computer models of conductivity percolation gave a critical exponent (t) of 2 for 3-d rigid rod network. However, various values of t from 1.3 to 5.3 had been reported for different CNTs/polymer composites [4,5] . Log-log plots ofσto (p-p c of three sets composites were generated by Eq.…”
Section: Electrical Propertymentioning
confidence: 99%