Electrical properties of thin-film structures formed by pulsed laser deposition of Au, Ag, Cu, Pd, Pt, W, Zr metals on n-6H-SiC crystal

Electrical parameters of a DC sputtered Mo/n-type 6H-SiC Schottky barrier diode

“…(2). Romanov et al [13] have obtained metal/n-6H-SiC diode structures with ideality factors of 1.28-2.14 and potential barriers from 0.58 to 0.62 eV on the semiconductor side by pulsed laser deposition of Au, Ag, Cu, Pd, Pt, W, and Zr metal films on n-6H-SiC substrates. Barrier height value of Mo/4H-SiC MS structure were reported as 1.39 eV by Boussouar et al [14].…”

Fabrication and analysis of zirconium thin films on silicon (Si) by pulsed laser deposition

“…This element is prevalent in numerous minerals, predominantly as zircon silicate and baddeleyite oxide. Its corrosion resistance makes it ideal for using in pumps, valves, and heat exchangers [2], and it's valued in steel and magnesium alloy production as an alloying component.…”

“…Studies on pure zirconium (Zr) thin film deposition are scarce. Romanov et al [2] observed that Zr's electrical conductance was slightly inferior to that of tungsten and gold when deposited on 6H-SiC substrates at 300 K using pulsed laser deposition. However, Zr still formed a conductive barrier adequate for electrical currents.…”

Synthesis and Characterization of a Zirconium (Zr) Thin Film on Si(100) via Pulsed Laser Deposition

“…Zirconium occurs naturally in about 30 mineral species, mostly as a silicate in zircon, the oxide baddeleyite and other oxide compounds. Due to its high resistance to corrosion, zirconium is widely used in the manufacture of pumps, valves, and heat exchangers [2]. Zirconium is also used as an alloying agent in the production of some magnesium alloys and as an additive in the manufacture of some steels.…”