“…Many such demonstrations used BTO deposited on MgO − or lanthanum aluminate (LAO) substrates, approaches that would still require heterogeneous integration with Si electronic or photonic devices. ,− In addition, patterning and etching of BTO are not yet well developed, and for this reason, many BTO-based photonic structures leverage a hybrid ridge waveguide architecture, where a deposited and patterned high index material serves to guide and confine the optical mode. Such an approach has resulted in remarkable performance, ,,,,,, with V π L as low as ∼0.23 V cm reported. ,, However, hybrid geometries have decreased overlap of the optical mode with the nonlinear BTO, and thus decreased the modulation efficiency ( V π L ). The development of monolithic BTO-based optoelectronic devices, all else being equal, offers potential gains in device efficiency and decreased fabrication complexity.…”