Electrochemical Equilibria of Copper in Aqueous Phosphoric Acid Solutions

Aksu, Serdar

doi:10.1149/1.3215996

Cited by 35 publications

(32 citation statements)

References 50 publications

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“…2). In pure phosphoric acid solution, the copper surface forms the copper phosphate island type salt film [6]. However, this film is not a continuous passivation film.…”

Section: Resultsmentioning

confidence: 99%

Effect of nitric acid on wet etching behavior of Cu/Mo for TFT application

Seo¹,

Lee²,

Park³

et al. 2011

Current Applied Physics

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“…2). In pure phosphoric acid solution, the copper surface forms the copper phosphate island type salt film [6]. However, this film is not a continuous passivation film.…”

Section: Resultsmentioning

confidence: 99%

Effect of nitric acid on wet etching behavior of Cu/Mo for TFT application

Seo¹,

Lee²,

Park³

et al. 2011

Current Applied Physics

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“…The viscous layer is believed to be the main resistance to the transport of copper(II) ions from the surface of the anode into the bulk liquid. 2,3,11,12 A mechanical vibration adjacent to a liquid body is known to support a steady flow. [13][14][15] The vibration excites a periodic boundary layer flow in the vicinity of the solid, within the viscous penetration length of the vibration into the liquid δ ≡ √ 2μ/ρω, where μ and ρ are the viscosity and density of the liquid, respectively, and ω is the angular frequency of the vibration.…”

mentioning

confidence: 99%

Editors' Choice—The Enhancement of Ion Transport in an Electrochemical Cell Using High Frequency Vibration for the Electropolishing of Copper

Dubrovski

Tietze

Zigelman

et al. 2018

J. Electrochem. Soc.

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A previous experiment showed that the rate of the electropolishing of a copper anode may be increased by twofold when generating a 60 KHz to 1.7 MHz frequency vibration in the anode. In this work we use theory to elucidate the mechanisms by which the vibration may enhance the transport of ions in the electrolyte solution and support the formation of dents in the anode, which was observed in experiment. We find that in the limit of weak ion convection the transport of ions mainly supports the formation of dents in the anode. However, in the limit of prominent ion convection we find an appreciable contribution of the vibration to the efficiency of the electropolishing process, in accordance with the previous experimental findings. The contribution of the vibration to ion transport is given by 2 √ PeDkC s /π √ π, in which the Peclét number, Pe, quantifies the ratio between the convective and diffusive fluxes of ions, and D, k, and C s are the diffusion coefficient of the ions, the wavenumber of the vibration, and the solubility limit of the ions in the electrolyte. Electropolishing is a well-known technique used to polish metal surfaces by employing electrochemistry.1 The most basic electropolishing system is a classic electrochemical cell, comprising an anode and a cathode in an electrolyte solution, as depicted in Fig. 1. The application of an electrical potential difference between the electrodes will decompose the surface of the anode -the metallic object to be polished -to metal ions that dissolve in the electrolyte solution. Sharp corners on the metal anode dissolve to ions faster than flat areas. Hence, the electropolishing process renders the surface of the anode smooth. In certain systems, the chemical complexation of metal ions with the electrolyte and water molecules will support phase separation and the formation of a viscous liquid phase (viscous layer) adjacent to the anode.2-8 The layer of viscous liquid serves as a barrier to the diffusion of ions from the surface of the anode and vice-versa, thereby reducing the efficiency of the electropolishing process. The density of the viscous liquid is assumed to be similar to the density of the electrolyte solution.It was previously found that exciting a high frequency (60-1700 KHz) mechanical vibration in the anode may enhance the efficiency of the electropolishing process by two-fold. 9,10 However, it appears that the vibration further supports the formation of dents on the surface of the anode. The experimental system investigated previously is depicted in Fig. 1. It is an electrochemical cell, which is comprised of copper electrodes, a power supply, and an electrolyte solution containing water, concentrated phosphoric acid, and isopropyl alcohol. A piezoelectric transducer generates vibration in the anode. Upon the application of an electrical potential difference between the electrodes, which initiates the electropolishing process, a viscous layer of a thickness of about 1-2 mm forms adjacent to the electrode, as depicted in Fig. 2. The viscous layer is...

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“…A formação de um filme anódico na superfície de cobre ocorre em um grande intervalo de potencial, e sua composição depende do eletrólito, do potencial aplicado e do tempo [94,113]. A formação de um filme passivante (filme anódico) na superfície de cobre tem sido associada à formação de Cu 2 O e CuO [94].…”

Section: Comportamento Voltamétrico Do Eletrodo De Cobre Em Solução Tunclassified

“…A formação de um filme passivante (filme anódico) na superfície de cobre tem sido associada à formação de Cu 2 O e CuO [94]. A formação desta camada passivante é acompanhada pelo aparecimento de espécies solúveis de Cu(I) e Cu(II) e, dependendo da natureza dos ânions predominantes em solução, pode ocorrer também a precipitação de sais de cobre insolúveis na camada passivante [94,109].…”

Section: Comportamento Voltamétrico Do Eletrodo De Cobre Em Solução Tunclassified

“…Apesar da utilização do ácido fosfórico em vários processos em meio aquoso, ainda há controvérsias quanto à identidade das espécies formadas e mecanismos de reação [94,112,[115][116] Estes resultados podem ser explicados em função da formação de espécies solúveis de cobre e da passivação causada pelo crescimento do filme anódico [37,94,105,[136][137][138]. …”

Section: Comportamento Voltamétrico Do Eletrodo De Cobre Em Solução Tunclassified

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Uso de eletrodos de cobre e eletrodos modificados como sensores eletroquímicos

Dantas¹

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Electrochemical Equilibria of Copper in Aqueous Phosphoric Acid Solutions

Cited by 35 publications

References 50 publications

Effect of nitric acid on wet etching behavior of Cu/Mo for TFT application

Effect of nitric acid on wet etching behavior of Cu/Mo for TFT application

Editors' Choice—The Enhancement of Ion Transport in an Electrochemical Cell Using High Frequency Vibration for the Electropolishing of Copper

Uso de eletrodos de cobre e eletrodos modificados como sensores eletroquímicos

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