Electrochemical impedance spectroscopy as a probe for wet chemical silicon oxide characterization

Bertagna, Valérie; Erre, R.; Rouelle, François; Lévy, Didier; Petitdidier, S.; Chemla, M.

doi:10.1007/s100080000163

Cited by 20 publications

(15 citation statements)

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“…We must point out that generally these models are appropriate to the kinetics of the oxidation mechanism, but none of them accounts for a dissolution process in a liquid phase. For SC1 solution, we assumed that the growth kinetics were controlled by the diffusion of the species, alternatively by field assisted transport, through the oxide layer, but with an additional term K related to the dissolution rate of the oxide [17,18]. This mechanism leads to a parabolic law during the very first stages of the growth, and tends to a plateau corresponding to the steady regime oxidation/dissolution.…”

Section: Discussionmentioning

confidence: 99%

“…Moreover electrochemical techniques, specifically electrochemical impedance spectroscopy, were used to study in situ the kinetics and interfacial reactivity of the silicon oxide growth in SC1 solutions [17,18]. In these papers we showed, in alkaline media, a higher permeability of the oxide barrier to ions and oxidizing agents, whereas this phenomenon vanished in acidic solutions.…”

Section: Introductionmentioning

confidence: 98%

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Non uniformities of silicon oxide films grown in peroxide mixtures

Bertagna¹,

Petitdidier²,

Rochat³

et al. 2005

Journal of Electroanalytical Chemistry

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Section: Discussionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 98%

Non uniformities of silicon oxide films grown in peroxide mixtures

Bertagna¹,

Petitdidier²,

Rochat³

et al. 2005

Journal of Electroanalytical Chemistry

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“…This surface aspect, also reported in KOH, NH 4 OH and TMAH solutions, has been extensively described in many papers (6). In line with the literature, the etchant concentration decrease combined with a warmer temperature leads to the highest density of pyramids.…”

Section: Resultsmentioning

confidence: 74%

Si and SiGe Alloys Wet Etching Using TMAH Chemistry

et al. 2013

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From MEMS to CMOS applications, silicon wet anisotropic etching is nowadays considered as an interesting alternative to face new and various technological challenges. This paper focuses on the TMAH chemistry and its use for Si and Si 1-x Ge x alloys etching. Comparing two different dispense modes (immersion and spin-on), the impact of TMAH experimental conditions on the etching kinetics as well as on the surface morphology is discussed. We demonstrated that alleviating TMAH-induced Si surface degradation can be obtained by transferring the TMAH etching process on a spray dispense tool. We also highlight the drastic impact of germanium incorporation on the silicon etch rate which opens the scope to TMAH for many applications.

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“…Thus,t he pre-cleaning procedure turns the ITOs urface completely hydrophilic, [30,31] whiche ventually helps for furtherp rocessing and analysis. To investigate SERS signal enhancement, both SSNS and LSNS werei mmobilised on two different substrates, namely,g lass and ITO surfaces.…”

Section: Immobilisation Of Au Ns Onto Ito Surfaces and Their Electrocmentioning

confidence: 99%

Controlled Growth of Gold Nanostars: Effect of Spike Length on SERS Signal Enhancement

2017

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Two different types of gold nanostars (Au NS), namely, short-spiked nanostars (SSNS) and long-spiked nanostars (LSNS), are prepared by using a hexagonal lyotropic liquid-crystalline (LLC) phase as a template. The formation, size and length of spikes or arms of the resultant Au NS are controlled by preparation in either a hexagonal LLC phase or an isotropic phase. These NS are anchored onto indium tin oxide (ITO) electrodes through a self-assembled monolayer of 3-mercaptopropyltrimethoxysilane, which acts as a linker molecule. Structural and morphological characterisations of SSNS- and LSNS-anchored ITO electrodes are performed by means of microscopic and spectroscopic analyses. Further electrochemical techniques, namely, cyclic voltammetry and electrochemical impedance spectroscopy, are also used to confirm the immobilisation of these Au NS on ITO electrodes and to study the electrochemical characteristics. These studies clearly reveal the formation of star-shaped, branched, anisotropic nanostructures of gold during the template preparation method and these Au NS are successfully anchored onto ITO electrodes through a covalent immobilisation strategy. Furthermore, the SERS activity of these Au NS is analysed by using glutathione and crystal violet as analytes and by employing glass and ITO as substrates. It is interesting to note that SSNS show a significant enhancement in SERS signals relative to those of LSNS.

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Electrochemical impedance spectroscopy as a probe for wet chemical silicon oxide characterization

Cited by 20 publications

References 0 publications

Non uniformities of silicon oxide films grown in peroxide mixtures

Non uniformities of silicon oxide films grown in peroxide mixtures

Si and SiGe Alloys Wet Etching Using TMAH Chemistry

Controlled Growth of Gold Nanostars: Effect of Spike Length on SERS Signal Enhancement

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