2020
DOI: 10.1134/s1023193520010036
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Electrochemical Local Maskless Micro/Nanoscale Deposition, Dissolution, and Oxidation of Metals and Semiconductors (A Review)

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Cited by 18 publications
(13 citation statements)
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“…The method is evolving and being perfected along the line of pulse machining. With pulsed current, anodic dissolution can be made more confined, and precision in transfer of the tool shape can be improved [2][3][4][5][6][7][8][9]. In addition, it seems to be nearly impossible to use ECM for processing large surfaces while not using pulsed machining.…”
Section: Introductionmentioning
confidence: 99%
“…The method is evolving and being perfected along the line of pulse machining. With pulsed current, anodic dissolution can be made more confined, and precision in transfer of the tool shape can be improved [2][3][4][5][6][7][8][9]. In addition, it seems to be nearly impossible to use ECM for processing large surfaces while not using pulsed machining.…”
Section: Introductionmentioning
confidence: 99%
“…metals, alloys, polymers, etc.). It can also be spatially localized to generate features from nm to mm-size by electrochemical writing [40][41][42], which is achieved typically by scanning electrochemical probe methods such as SECM [43][44][45] or scanning droplet cell (SDC) [46,47]. The early works have been reviewed [43,48,49].…”
Section: Application Of the Shaped Gel For Electrochemical Writingmentioning
confidence: 99%
“…Anodic dissolution of metals and alloys is a basis of a number of processes aimed at both imparting specific properties to metal surfaces and metal shaping, i.e., the processes which render them the required shape and size and involving also the micro-and nanoscale levels [1][2][3][4][5][6][7][8]. This work concentrates on high-rate anodic dissolution processes that occur at high anodic current densities and high anodic potentials and are considerably far away from thermodynamic equilibrium.…”
Section: Introductionmentioning
confidence: 99%