Electrochemical micromachining with ultrashort voltage pulses–a versatile method with lithographical precision

Kock, Matthias; Kirchner, Viola; Schuster, Rolf

doi:10.1016/s0013-4686(03)00374-8

Cited by 234 publications

(167 citation statements)

References 8 publications

Supporting

Mentioning

158

Contrasting

Unclassified

Order By: Relevance

“…A further adaptation is the introduction of a pulsed current power supply. First exploited in general electrochemical machining [37,44,45] inhomogeneity in the flow field is reduced due to the rapid updating of the electrolyte. This ensures that machining is restricted to beneath the jet as the electric double layer takes longer to form in the lower current density areas at the periphery of the jet [46,47].…”

Section: Profile Fidelity Enhancementsmentioning

confidence: 99%

Transitory electrochemical masking for precision jet processing techniques

Mitchell-Smith

Speidel

Clare

2018

Journal of Manufacturing Processes

View full text Add to dashboard Cite

a b s t r a c tElectrochemical jet processing techniques provide an efficient method for large area surface structuring and micro-milling, where the metallurgy of the near-surface is assured and not adversely affected by thermal loading. Here, doped electrolytes are specifically developed for jet techniques to exploit the Gaussian energy distribution as found in energy beam processes. This allows up to 26% reduction in dissolution kerf and enhancements of the defined precision metric of up to 284% when compared to standard electrolytes. This is achieved through the filtering of low energy at discrete points within the energy distribution curve. Two fundamental mechanisms of current filtering and refresh rate are proposed and investigated in order to underpin the performance enhancements found using this methodology. This study aims to demonstrate that a step change in process fidelity and flexibility can be achieved through optimisation of the electrochemistry specific to jet processes.

show abstract

Section: Profile Fidelity Enhancementsmentioning

confidence: 99%

Transitory electrochemical masking for precision jet processing techniques

Mitchell-Smith

Speidel

Clare

2018

Journal of Manufacturing Processes

View full text Add to dashboard Cite

show abstract

“…The time of double layer charging to the activation overpotential depends on gap thickness, therefore, the voltage pulse length can define the spatial resolution of machining (pulse time determine how far from the tool workpiece surface reach activation overpotential). According to the Butler-Volmer equation (valid only in an active state of dissolution), the current density i is exponentially related to the overpotential, therefore, a small change of the electrode potential leads to a large change of the current density, thus the additional effect of dissolution localization occurs [6,18,19,40]. Such an effect is irrelevant in machining with a longer pulse time (t i > 0, 5 μs) because the double layer is charged uniformly over the machining surface, and machining is carried out in the diffusionlimited state (the current density is determined by transport phenomena in the gap).…”

Section: Characteristic Of Electrochemical Micromachiningmentioning

confidence: 99%

Discussion of ultrashort voltage pulses electrochemical micromachining: a review

Skoczypiec

2016

Int J Adv Manuf Technol

View full text Add to dashboard Cite

One of the most effective way of electrochemical machining (ECM) accuracy increase is to carry out process with application of voltage pulses. In one of the variants of ECM, ultra short (nono-or picosecond range) voltage pulses are applied. It gives possibility to achieve high localization of electrochemical dissolution process and allows to machine microparts with accuracy less than 0.01 mm. However, because of the process principles, this variant of ECM has number of limitations which stop its wider application in micromanufacturing industry. Based on the literature review, the physical principles of ultrashort voltage pulses electrochemical machining were presented and anodic dissolution localization issues were discussed. Also, differences between other electrochemical machining variants were underlined. It gave possibility to identify limitations and future perspectives of industrial applications.

show abstract

“…For example, Schuster [1] proposed the EMM with nanosecond ultra-short pulse current, which can achieve the sub micron precision. Di Zhu [2] adopted the reciprocating wire to cut the micro thin-wall by using micro wire electrochemical cutting with nanosecond pulse current; Shufeng Sun [3] machined high precision micro gear with femtosecond laser.…”

Section: Introductionmentioning

confidence: 99%

Key Technology of Electrochemical Micromachining with Laser masking

Li¹,

Wang²,

Wang³

et al. 2018

Proceedings of the 2nd International Forum on Management, Education and Information Technology Application (IFMEITA 2017)

View full text Add to dashboard Cite

Abstract. In order to fabricate the micro patterns cavities with micro size on 304 stainless steel, electrochemical micromachining (EMM) with laser masking based on surface modification by fiber laser masking was studied, and a device of laser-assisted EMM with the special pulse power supply was developed to achieve micro machining, which possessed the complete control system. Laser marking on the surface of 304 stainless steel can first be realized by fiber laser scanning and heating. During laser marking, metal oxide layer with pre-designed pattern can be formed by laser marking, and phase transformation can also occur at the laser scanning area on 304 stainless steel surface, which forms the laser masking layer with good corrosion resistance. The stainless steel surface with laser masking layer is subsequently etched by EMM, the laser masking layer severs as the temporary protective layer without relying on lithography mask. Accordingly, micro pattern cavities can fast be fabricated. Through machining experiments, the typical samples 23μm deep were fabricated under the optimized parameters.

show abstract

Electrochemical micromachining with ultrashort voltage pulses–a versatile method with lithographical precision

Cited by 234 publications

References 8 publications

Transitory electrochemical masking for precision jet processing techniques

Transitory electrochemical masking for precision jet processing techniques

Discussion of ultrashort voltage pulses electrochemical micromachining: a review

Key Technology of Electrochemical Micromachining with Laser masking

Contact Info

Product

Resources

About